JPS5442980A - Electron beam unit - Google Patents

Electron beam unit

Info

Publication number
JPS5442980A
JPS5442980A JP10900577A JP10900577A JPS5442980A JP S5442980 A JPS5442980 A JP S5442980A JP 10900577 A JP10900577 A JP 10900577A JP 10900577 A JP10900577 A JP 10900577A JP S5442980 A JPS5442980 A JP S5442980A
Authority
JP
Japan
Prior art keywords
electron beam
beam unit
unit
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10900577A
Other languages
English (en)
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP10900577A priority Critical patent/JPS5442980A/ja
Publication of JPS5442980A publication Critical patent/JPS5442980A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10900577A 1977-09-10 1977-09-10 Electron beam unit Pending JPS5442980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10900577A JPS5442980A (en) 1977-09-10 1977-09-10 Electron beam unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10900577A JPS5442980A (en) 1977-09-10 1977-09-10 Electron beam unit

Publications (1)

Publication Number Publication Date
JPS5442980A true JPS5442980A (en) 1979-04-05

Family

ID=14499143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10900577A Pending JPS5442980A (en) 1977-09-10 1977-09-10 Electron beam unit

Country Status (1)

Country Link
JP (1) JPS5442980A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875746A (ja) * 1981-10-30 1983-05-07 Toshiba Corp 荷電ビ−ム光学鏡筒
JPH04269819A (ja) * 1991-01-07 1992-09-25 Internatl Business Mach Corp <Ibm> 荷電粒子ビーム偏向装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52103967A (en) * 1976-02-05 1977-08-31 Western Electric Co Method of iluminating surface of material to be machined and apparatus therefor
JPS5353978A (en) * 1976-10-27 1978-05-16 Fujitsu Ltd Rotating position relation adjusting method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52103967A (en) * 1976-02-05 1977-08-31 Western Electric Co Method of iluminating surface of material to be machined and apparatus therefor
JPS5353978A (en) * 1976-10-27 1978-05-16 Fujitsu Ltd Rotating position relation adjusting method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875746A (ja) * 1981-10-30 1983-05-07 Toshiba Corp 荷電ビ−ム光学鏡筒
JPH04269819A (ja) * 1991-01-07 1992-09-25 Internatl Business Mach Corp <Ibm> 荷電粒子ビーム偏向装置

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