JPS5437580A - Dry etching method and target film used for it - Google Patents

Dry etching method and target film used for it

Info

Publication number
JPS5437580A
JPS5437580A JP10451477A JP10451477A JPS5437580A JP S5437580 A JPS5437580 A JP S5437580A JP 10451477 A JP10451477 A JP 10451477A JP 10451477 A JP10451477 A JP 10451477A JP S5437580 A JPS5437580 A JP S5437580A
Authority
JP
Japan
Prior art keywords
dry etching
etching method
film used
target film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10451477A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5544450B2 (https=
Inventor
Masao Tajima
Yukinori Kuroki
Koji Mizusawa
Makoto Asakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
NTT Inc
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10451477A priority Critical patent/JPS5437580A/ja
Publication of JPS5437580A publication Critical patent/JPS5437580A/ja
Publication of JPS5544450B2 publication Critical patent/JPS5544450B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP10451477A 1977-08-30 1977-08-30 Dry etching method and target film used for it Granted JPS5437580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10451477A JPS5437580A (en) 1977-08-30 1977-08-30 Dry etching method and target film used for it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10451477A JPS5437580A (en) 1977-08-30 1977-08-30 Dry etching method and target film used for it

Publications (2)

Publication Number Publication Date
JPS5437580A true JPS5437580A (en) 1979-03-20
JPS5544450B2 JPS5544450B2 (https=) 1980-11-12

Family

ID=14382592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10451477A Granted JPS5437580A (en) 1977-08-30 1977-08-30 Dry etching method and target film used for it

Country Status (1)

Country Link
JP (1) JPS5437580A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158873A (en) * 1980-05-14 1981-12-07 Hitachi Ltd Dry etching method
JPS587829A (ja) * 1981-07-08 1983-01-17 Toshiba Corp ドライエツチング方法
JPS6224627A (ja) * 1985-07-25 1987-02-02 Sony Corp ドライエツチング方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220095617A1 (en) 2019-01-16 2022-03-31 Idemitsu Kosan Co.,Ltd. Plant growth regulating agent

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991771A (https=) * 1972-12-31 1974-09-02
JPS5259580A (en) * 1975-11-11 1977-05-17 Matsushita Electric Ind Co Ltd Photo etching method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991771A (https=) * 1972-12-31 1974-09-02
JPS5259580A (en) * 1975-11-11 1977-05-17 Matsushita Electric Ind Co Ltd Photo etching method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158873A (en) * 1980-05-14 1981-12-07 Hitachi Ltd Dry etching method
JPS587829A (ja) * 1981-07-08 1983-01-17 Toshiba Corp ドライエツチング方法
JPS6224627A (ja) * 1985-07-25 1987-02-02 Sony Corp ドライエツチング方法

Also Published As

Publication number Publication date
JPS5544450B2 (https=) 1980-11-12

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