JPS5544450B2 - - Google Patents
Info
- Publication number
- JPS5544450B2 JPS5544450B2 JP10451477A JP10451477A JPS5544450B2 JP S5544450 B2 JPS5544450 B2 JP S5544450B2 JP 10451477 A JP10451477 A JP 10451477A JP 10451477 A JP10451477 A JP 10451477A JP S5544450 B2 JPS5544450 B2 JP S5544450B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10451477A JPS5437580A (en) | 1977-08-30 | 1977-08-30 | Dry etching method and target film used for it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10451477A JPS5437580A (en) | 1977-08-30 | 1977-08-30 | Dry etching method and target film used for it |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5437580A JPS5437580A (en) | 1979-03-20 |
| JPS5544450B2 true JPS5544450B2 (https=) | 1980-11-12 |
Family
ID=14382592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10451477A Granted JPS5437580A (en) | 1977-08-30 | 1977-08-30 | Dry etching method and target film used for it |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5437580A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020149373A1 (ja) | 2019-01-16 | 2020-07-23 | 出光興産株式会社 | 植物生育調節剤 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56158873A (en) * | 1980-05-14 | 1981-12-07 | Hitachi Ltd | Dry etching method |
| JPS587829A (ja) * | 1981-07-08 | 1983-01-17 | Toshiba Corp | ドライエツチング方法 |
| JPS6224627A (ja) * | 1985-07-25 | 1987-02-02 | Sony Corp | ドライエツチング方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5633857B2 (https=) * | 1972-12-31 | 1981-08-06 | ||
| JPS5259580A (en) * | 1975-11-11 | 1977-05-17 | Matsushita Electric Ind Co Ltd | Photo etching method |
-
1977
- 1977-08-30 JP JP10451477A patent/JPS5437580A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020149373A1 (ja) | 2019-01-16 | 2020-07-23 | 出光興産株式会社 | 植物生育調節剤 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5437580A (en) | 1979-03-20 |