JPS543743B2 - - Google Patents

Info

Publication number
JPS543743B2
JPS543743B2 JP10130173A JP10130173A JPS543743B2 JP S543743 B2 JPS543743 B2 JP S543743B2 JP 10130173 A JP10130173 A JP 10130173A JP 10130173 A JP10130173 A JP 10130173A JP S543743 B2 JPS543743 B2 JP S543743B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10130173A
Other languages
Japanese (ja)
Other versions
JPS502968A (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS502968A publication Critical patent/JPS502968A/ja
Publication of JPS543743B2 publication Critical patent/JPS543743B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
JP10130173A 1973-04-09 1973-09-10 Expired JPS543743B2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00349169A US3851526A (en) 1973-04-09 1973-04-09 Fluid flowmeter

Publications (2)

Publication Number Publication Date
JPS502968A JPS502968A (enrdf_load_html_response) 1975-01-13
JPS543743B2 true JPS543743B2 (enrdf_load_html_response) 1979-02-26

Family

ID=23371193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10130173A Expired JPS543743B2 (enrdf_load_html_response) 1973-04-09 1973-09-10

Country Status (2)

Country Link
US (1) US3851526A (enrdf_load_html_response)
JP (1) JPS543743B2 (enrdf_load_html_response)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4658855A (en) * 1980-10-03 1987-04-21 Silicon Valley Group Mass flow controller
US4340050A (en) * 1980-12-29 1982-07-20 Delmed Inc. Medical fluid flow rate indicating/controlling device
US4375813A (en) * 1981-02-10 1983-03-08 Delmed, Inc. Medical fluid flow rate controlling device
JPS5810705U (ja) * 1981-07-10 1983-01-24 日本光電工業株式会社 呼吸流量計の抵抗管
NL8104354A (nl) * 1981-09-22 1983-04-18 Wijbren Jouwsma Laminair stromingselement.
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
US4524616A (en) * 1983-09-02 1985-06-25 Tylan Corporation Adjustable laminar flow bypass
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
US4555939A (en) * 1984-03-19 1985-12-03 Honeywell Inc. Condition responsive sensor for fluid flow measurement
US4672997A (en) * 1984-10-29 1987-06-16 Btu Engineering Corporation Modular, self-diagnostic mass-flow controller and system
US5044199A (en) * 1989-11-13 1991-09-03 Dxl International, Inc. Flowmeter
US5100100A (en) * 1990-09-12 1992-03-31 Mks Instruments, Inc. Fluid control and shut off valve
US5142907A (en) * 1991-04-17 1992-09-01 Mks Instruments, Inc. Constant temperature gradient fluid mass flow transducer
NL9200414A (nl) * 1992-03-06 1993-10-01 Bronkhorst High Tech Bv Laminair stromingselement met geintegreerd turbulentiefilter.
US5511416A (en) * 1993-09-15 1996-04-30 Alicat Scientific, Inc. Wide range laminar flow element
US5461913A (en) * 1994-06-23 1995-10-31 Mks Instruments, Inc. Differential current thermal mass flow transducer
JP3188375B2 (ja) * 1994-12-12 2001-07-16 日本エム・ケー・エス株式会社 層流素子
US5576498A (en) * 1995-11-01 1996-11-19 The Rosaen Company Laminar flow element for a flowmeter
US5763791A (en) * 1995-11-01 1998-06-09 The Rosaen Company Flowmeter
US5804717A (en) * 1996-04-05 1998-09-08 Mks Instruments, Inc. Mass flow transducer having extended flow rate measurement range
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
US6338277B1 (en) * 1997-06-06 2002-01-15 G. Kromschroder Aktiengesellschaft Flowmeter for attenuating acoustic propagations
US6631334B2 (en) 2000-12-26 2003-10-07 Mks Instruments, Inc. Pressure-based mass flow controller system
US6668642B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal isolation of thermal mass flow sensor
US6668641B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal dissipation in a thermal mass flow sensor
US6779394B2 (en) 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
US7431045B2 (en) * 2002-08-28 2008-10-07 Horiba Stec, Co., Ltd. Flow restrictor
US8376312B2 (en) * 2003-08-28 2013-02-19 Horiba, Ltd. Flow restrictor
WO2005086643A2 (en) * 2004-02-27 2005-09-22 Horiba Stec, Co., Ltd. Flow restrictor
US7117104B2 (en) * 2004-06-28 2006-10-03 Celerity, Inc. Ultrasonic liquid flow controller
US7584665B2 (en) * 2005-01-14 2009-09-08 Kulite Semiconductor Products, Inc. Combustion transducer apparatus employing pressure restriction means
JP2007041870A (ja) * 2005-08-03 2007-02-15 Horiba Stec Co Ltd ガス流量制御方法
WO2007021883A1 (en) * 2005-08-12 2007-02-22 Celerity, Inc. Ultrasonic flow sensor
US8881768B2 (en) 2009-05-27 2014-11-11 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
EP2455724B1 (de) 2010-11-18 2016-09-21 Axetris AG Flusssensor
US20140264132A1 (en) 2013-03-15 2014-09-18 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
NO20130583A1 (no) 2013-04-29 2014-10-30 Typhonix As Separasjonsvennlig trykkreduksjonsinnretning
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
US10310521B2 (en) * 2016-04-07 2019-06-04 Hitachi Metals, Ltd. Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
NL2017185B1 (en) * 2016-07-18 2018-01-24 A De Kock Holding B V Laminar flow module
DE102019110073A1 (de) * 2019-04-16 2020-10-22 Burkert S.A.S. Strömungswiderstandseinsatz und Durchflussmess- oder Durchflussregeleinrichtung
US11841036B2 (en) 2019-08-05 2023-12-12 Ichor Systems, Inc. Laminar flow restrictor and seal for same
WO2021026222A1 (en) * 2019-08-05 2021-02-11 Ichor Systems, Inc. Seal for a flow restrictor
JP7413505B2 (ja) 2019-08-05 2024-01-15 アイコール・システムズ・インク 層流制限器
US12220657B2 (en) * 2021-04-30 2025-02-11 Pall Corporation Filter disk segments
US12203493B2 (en) * 2022-01-10 2025-01-21 Horiba Stec, Co., Ltd. Flow restrictor for fluid flow device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1559547A (en) * 1920-03-25 1925-11-03 Francis H Brown Pressure-responsive device
US1870849A (en) * 1928-06-09 1932-08-09 Hodgson John Lawrence Flow quantity meter
US3071160A (en) * 1959-07-01 1963-01-01 Nat Instr Lab Inc Fluid restrictor for linear flow meters
US3330156A (en) * 1965-09-08 1967-07-11 Jesse W Thomas Fluid flowmeters
US3613448A (en) * 1969-11-26 1971-10-19 Teledyne Inc Fluid flow measuring apparatus

Also Published As

Publication number Publication date
JPS502968A (enrdf_load_html_response) 1975-01-13
US3851526A (en) 1974-12-03

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