US3851526A - Fluid flowmeter - Google Patents

Fluid flowmeter Download PDF

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Publication number
US3851526A
US3851526A US00349169A US34916973A US3851526A US 3851526 A US3851526 A US 3851526A US 00349169 A US00349169 A US 00349169A US 34916973 A US34916973 A US 34916973A US 3851526 A US3851526 A US 3851526A
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Prior art keywords
flow
disk
conduit
fluid
opening
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Ceased
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US00349169A
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English (en)
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C Drexel
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Entegris Inc
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Tylan Corp
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US case filed in International Trade Commission litigation https://portal.unifiedpatents.com/litigation/International%20Trade%20Commission/case/337-TA-91 Source: International Trade Commission Jurisdiction: International Trade Commission "Unified Patents Litigation Data" by Unified Patents is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Tylan Corp filed Critical Tylan Corp
Priority to US00349169A priority Critical patent/US3851526A/en
Priority to JP10130173A priority patent/JPS543743B2/ja
Application granted granted Critical
Publication of US3851526A publication Critical patent/US3851526A/en
Priority to US06/346,422 priority patent/USRE31570E/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles

Definitions

  • a flow restrictor comprising at [58] Field of Search 73/202, 204, 205 R, 205 L, least one disk having an. opening through opposite sur- 73/21 1, 205 D .faces and at least one conduit from the opening to the 1 perimeter of the disk, each conduit having an effective [56] Refere s Cit d length to diameter ratio sufficient to assure laminar UNITED STATES PATENTS fluld l,559,547 11/1925 Brown 73/211 10 Claims, 15 Drawing Figures PATENTELBEE 319M FIGA.
  • FIGS FLUID FLOWMETER FIELD OF THE INVENTION The fields of art to which the invention pertains include the fields of pressure differential measuring and testing devices, flowmeters and conduit restrictors and flow elements.
  • the flow rate of a fluid is measured not by directly determining the pressure differential across a restrictor, but by measuring the actual flow of a small portion of fluid.
  • Such applications require that the flow of the fluid be divided into two or more paths with an exact ratio maintained between the individual path flow rates.
  • a very small percentage of the flow is diverted into a measuring section. This percentage may be as small as 1 part in 40,000 and the flow measuring section is typically a very thin tubular conduit which is much longer that its diameter so that laminar flow prevails throughout the conduit.
  • the flow rate is directly proportional to pressure drop and inversely proportional to viscosity.
  • the present invention provides simple and economical methods for assuring laminar flow in both the measuring section and bypass section of a flow splitter so that a constant and predetermined ratio is maintained across the entire range of flow rates to be measured.
  • the present construction overcomes the disadvantages referred to above and additionally provides a wide range of flow, as high as l,000:l or higher, obtained with facility and repeatable accuracy. This has been accomplished by using as a flow restrictor one or a juxtaposed plurality of disks, each having one or a plurality of channels formed from its perimeter to an opening through opposite sides of the disk. Fluid is directed to the perimeter of the disk or disks and is conveyed by the conduits to the opening.
  • the conduits have sufficiently large length to diameter ratios (or length to effective hydraulic radius, as defined hereinafter) to assure laminar flow of the fluid.
  • the flow restrictor comprises flat, smooth sided juxtaposed disks, formedwith central, aligned openings.
  • the central. opening in each disk communicates via one or more conduits radiating from the central opening to the perimeter of the disk.
  • the flow restrictor is combined with an elongate laminar flow conduit, serving as a measuring section, to form a substantially linear flowmeter.
  • a substantially linear flowmeter includes a housing having a fluid inlet and fluid outlet, the housing defining a fluid path between the inlet and outlet.
  • the flow restrictor is disposed in this fluid path in parallel circuit with the measuring section conduit.
  • Means are provided for measuring the rate of flow of fluid through the measuring section conduit, which means are known in the prior art and constitute no part of the present invention. The result is a compact structure of simple construction which demonstrates high accuracy in measurements over a substantial range of flow temperature and pressure conditions.
  • FIG. 1 is a schematic representation of the fluid flow paths in a flow divider
  • FIG. 2 is a schematic illustration in cross-section of portions of a flowmeter incorporating a flow restrictor of this invention
  • FIG. 3 is an enlarged cross-sectional view of the flow restrictor portion of the flowmeter of FIG. 2;
  • FIG. 4 is a front elevational view of an exemplary flow restrictor disk used in the flow element of FIG. 3, taken on the line 4-4 of FIG. 3;
  • FIG. 5 is a cross-sectional view of the flow restrictor disk of FIG. 4, taken on line 5-5 of FIG. 4;
  • FIG. 6 is a cross-sectional view of the flow restrictor disk of FIG. 4, taken on line 6-6 of FIG. 4;
  • FIGS. 7-14 are front views of alternative flow restrictor disks.
  • FIG. 15 is a perspective view of another alternativev flow restrictor disk.
  • FIGS. 26 The invention will first be described with respect to a particular type of restrictor or flow element disk as illustrated in FIGS. 26. Subsequently, alternative disk configurations will be described as illustrated in FIGS. 7-15. The invention will be described with respect to fluid flowing from left to right in FIGS. 1-3, but the devices described herein are as effective with a reverse fluid flow.
  • fluid paths A and B constitute the flow through a flowmeter from the inlet at P to the outlet P
  • the line labeled PATH A represents fluid flow through the measuring section of the flowmeter and the line designated PATH B represents fluid flow through the bypass section of the flowmeter.
  • the pressure drop is the same across each path. It is desired to have the flow rate in PATH A divided by the flow rate in PATH B be a constant at all times.
  • PATH A is a tube of sufficient elongation to assure laminar flow.
  • PATH B must also assure laminar flow, otherwise the flow ratio would have an undesirable dependency upon temperature and pressure.
  • Flow through a channel may be characterized by the nondimensional parameter known as the Reynolds number where where d) is the density of the fluid, v,, is the mean velocity in the conduit, u is the fluid viscosity and m is the hydraulic radius defined as the conduit area divided by the conduit perimeter.
  • the effective diameter of the conduit can be considered to be 4m.
  • the Reynolds number expresses the ratio of the inertia forces to the viscous forces in the fluid. For low values of R, the flow is laminar, while for high values of R, inertia forces predominate and the flow tends to be turbulent.
  • the Reynolds number transition generally occurs in the range of about 1,600 to about 2,800 Reynolds number.
  • the transition Reynolds number can be determined by noting the mean velocity at which fluid of known density and viscosity flows in a turbulent manner and applying the information to the formula set forth above.
  • the following embodiments illustrate a number of specific structures to accomplish laminar flow in the bypass section, PATH B, in combination with laminar flow in the measuring section, PATH A.
  • Each of these embodiments provide a flow restrictor in the fluid path through the bypass section, PATH B, defining radially inward (or outward) flow through conduits having length to effective diameter ratios sufficiently large to assure laminar fluid flow.
  • the fluid being measured is gaseous, but the structure and concepts are applicable to liquids as well.
  • the flowmeter includes a housing 12 bored and counterbored to define a passageway 14 formed with inlet and outlet ports 16 and 18, respectively, for the fluid whose flow is to be measured.
  • a reduced diameter portion 20 defines an annular shoulder 22 for receiving a flow restrictor 24 and an upstream flow directing hollow cylindrical nut 25.
  • the flow restrictor '24 includes one or a plurality of channeled disks 27 which will be described hereinafter in more detail.
  • a passageway region 26 is threaded and received the flow restrictor 24 and the matingly threaded cylindrical nut 25.
  • the cylindrical nut is formed with notches 30 across its far end so as to be readily threaded into the passageway 14 against flow restrictor 24 to secure the flow restrictor 24 in abutment with the shoulder 22.
  • An expanded diameter passageway region 32 defines a shoulder 34 spaced from the end of the cyf lindrical nut 25 for receiving a filter screen 36.
  • the passageway region 32 is threaded and receives a matingly threaded cylindrical securing member 38 for abutment against the filter screen 36, securing the screen 36 in place.
  • Upstream and downstream taps in the form of bore holes 40 and 42, respectively, in the housing, are provided for disposing respective attachment ends 44 and 46 of a measuring section tube 48 on opposite sides of the combination of flow directing nut 25 and flow restrictor 24.
  • the attachment ends 44 and 46 are tubular members through which the ends of the measuring section tube 48 are tightly secured, so that fluid flowing into the attachment ends 44 and 46 is conducted entirely through the measuring section tube 48.
  • the measuring section tube is very thin and elongate; in this exemplary embodiment the tube 48 has an inside diameter of 0.010 inch and a length of 3.1 inches.
  • Thermal elements 50 and 52 on the outside of the tube detect the mass flow rates of fluid passing through the tube 48. The method by which this is accomplished is known to the art and per se does not constitute a part of this invention.
  • the flow restrictor 24 consists of a plurality of juxtaposed channeled disks 27 stacked together to create a desired pressure drop and flow rate. This particular illustration incorporates seven disks each with flat parallel surfaces and 0.005 inch in width. There can be as few as 1 disk 27 or as many as 20 or more, depending upon the desired pressure drop and capacity of the housing 12.
  • each of the disks 27 is formed flat, as a washer, with a central opening 54 through the opposite parallel surfaces.
  • four conduits or channels 56 are formed through the front surface 58 of the disk radiating from the central opening 54 outwardly to the perimeter 60 of the disk.
  • the channels 56 serve to conduct fluid from the periphery of the disk 27 to the opening 54.
  • each disk should be flat and its surfaces smooth and free from burrs or unevenness that would interfere with fluid flow in the channels 56 or cause the disks 27 to be separated. Sufficient smoothness can be achieved with chemical etching.
  • the diameter of the disk 27 is 0.480 inch
  • the diameter of the central opening is 0.270 inch
  • the length of the channel is 0.105 inch.
  • the channel 56 is rectangular in cross-section and has height and width dimensions of 0.0025 inch and 0.0085 inch, respectively.
  • the cross-sectional area of each channel 56 is 0.000021
  • the effective hydraulic radius of the channel can be calculated as the radius of a circle having an equivalent cross-sectional area; in this case the effective hydraulic radius is 0.0026 inch. Accordingly, each channel has a length to effective hydraulic radius of about 40:1.
  • the ratio of length to effective hydraulic radius should be at least 4:1 and can be as high as 200:1 or higher.
  • the mesh filter 36 located upstream of the flow element 24 passes 5 micron particles. In view of the much larger channel diameter, the flow element 24 is protected from clogging from contaminants in the fluid stream.
  • the cylindrical nut 25 operates in conjunction with the flow restrictor 27 to direct fluid through the conduits 56 radially inwardly to the central opening 54.
  • the nut 25 is hollow and open at its upstream end 62 and closed at its downstream end by an end wall 64.
  • the annular side wall 66 of the nut defines a plurality of openings 68 adjacent the end wall 64. In this embodiment four such openings are formed, each 0.093 inch in diameter.
  • three elongate cylindrical pins 70 each threaded at its end are disposed in threaded openings therefor in the downstream surface of the end wall 64. The pins jut from the end wall 64 a distance sufficient to carry the disks 27 for alignment thereof.
  • the desired number of disks 27 are merely stacked on the pins 70 to define the flow element 24.
  • the nut 66 is then threaded into the passageway region 26 so that the flow element 24 abuts the shoulder 34 and the nut end wall 64 abuts the flow element 24 and presses the component disks 27 together. No seals are required since the components can be tightly assembled.
  • the remainder of the flowmeter is assembled as known to the art and flowmeter electronics are assembled in the housing as known to the prior art, and which are not per se a part of the invention herein.
  • fluid is fed into the inlet 16 whereupon it is filtered by the filter screen 36 and travels into the hollow nut 25, through the holes 68 to the perimeters of the stacked disks 27, radially through the conduits 56, to and through the aligned disk openings 54 and emerging from'the outlet 18.
  • a portion of the fluid stream is diverted through the measuring section tube 48, flowing therethrough to meet the emerging fluid at the outlet 18.
  • flow through both the measuring section tube 48 and flow element 24 are laminar, yielding accurate measurements over a substantial range of flow, temperature and pressure conditions.
  • each disk 27 has sufficient thickness to retain dimensional integrity when squeezed by the nut 25. Because of the flatness of the disks 27, the flow meter is not significantly affected by variations in compressive force caused by tightening of the nut 27. Installation of the flow directing components is simple and requires no calibration adjustments for predetermined combinations of disks. Importantly, the present construction permits channels of substantial length allowing substantial cross-section for high lengthzhydraulic radius ratios. Accordingly, relatively large size particles can pass through the system without plugging the flow restrictor. Furthermore, the entire assembly can be formed of metal, without requiring seals, allowing use of the flow restrictor with otherwise corrosive fluids.
  • the particular structure of the'disks 27 can be varied in number and in configuration to accomodate various flow ranges. Disks having 1-60 or more channels can be used, as well as disks having non-linear channel shapes such as will be described below, in any combination of from 1-40 disks or more to achieve any particular flow range.
  • the desired arrangement can be obtained with simple experimentation or by calculations using the Reynolds number equation given above. Thus, it has been found that a flow range of 5 to 5,000 standard cubic centimeters per minute could be achieved by stacking l-20 disks comprising one to three differently configurated disks having one, 10 and 50 channels.
  • the diameter of the disk opening 54 and the diameter of the disk itself can be varied to suit par ticular needs.
  • FIGS. 7-15 a variety of disk configurations are shown.
  • a disk 77 is shown having a central opening 74 and a single channel 76 linearly formed in one surface from the opening 74 to the perimeter of the disk 77.
  • a disk 87 is shown having a central opening 84 and 10 channels 86 radiating from the opening 84 to the disk perimeter.
  • a disk 97 is shown having a central opening 94 and 50 radiating channels 96.
  • a disk 107 is shown having a central opening 104 and four curved channels 106 extending from the opening 104 to the disk perimeter in pinwheel fashion.
  • a disk 117 is shown having a central opening 114 and a single spirally formed channel 116 connecting the opening 114 to the disk perimeter.
  • a disk 127 is shown having a central opening 124 and a series of maze-like concentric channels 126 therearound connected by short channels to provide communication between the opening 124 and disk perimeter.
  • a disk 137 is shown having a central opening 134 and a plurality of circular channels 136 annularly disposed about the opening 134, connected to the opening 134 and disk perimeter by short channels 135.
  • a disk 147 is shown having a central opening 144 and a plurality of diamond-shaped channels 146 annularly disposed about the opening 144, connected to the opening 144 and disk perimeter by short channels 145.
  • a disk 157 is shown having a central opening 154 and a plurality of channels 156 in the form of elongate conduits drilled through the body of the disk 157 from the perimeter 159 to the opening 154.
  • each of the disks illustrated in FIGS. 7-15 can be substituted for one or more disks in the embodiment illustrated in FIG. 3.
  • Other variations are also permissable; for example the opening in each disk can be offcenter and means, such as a jig or appropriately spaced alignment pins on the nut 25 can be provided for alignment.
  • a flowmeter comprising:
  • a housing having a fluid inlet and a fluid outlet defining a first fluid path therebetween;
  • a flow restrictor in said first fluid path comprising at least one disk having a front surface and a rear surface connected by a perimeter surface, an opening through said front and rear surfaces and at least one conduit through said perimeter surface to said opening, said conduit being of a length to diameter ratio to provide laminar flow;
  • said flow element comprises a plurality ofjuxtaposed disks, including said one disk, each disk having a front surface and a rear surface connected by a perimeter surface, each disk having an opening through said front and rear surfaces and at least one conduit through said perimeter surface to said opening, the opening of said plurality of disks being aligned.
  • a flowmeter comprising:
  • a housing having a fluid inlet and a fluid outlet defining a first fluid path therebetween;
  • a flow restrictor in said first fluid path comprising at least one disk having a front surface and a rear surface connected by a perimeter surface, an opening through said front and rear surfaces and at least one conduit through said perimeter surface to said opening, said conduit being ofa length to diameter ratio to provide laminar flow;
  • said housing comprising a wall defining said fluid inlet, said wall being threaded, and including a retaining member in said inlet for securing said flow restrictor in said first fluid path, said retaining member being hollow and externally threaded to mate with said housing wall thread, said retaining member being open at one end and closed at its opposite end, said opposite end of said retaining member abutting said flow restrictor at one of said front and rear surfaces thereof, and means in said housing for retaining the opposite surface of said flow restrictor against movement, said retaining member being formed with at. least one lateral opening therethrough, the effective outer diameter of said flow restrictor being smaller than the effective inner diameter of said inlet whereby fluid introduced into said retaining member flows through said lateral opening, through said conduit, into said disk opening and out thereof to define said second fluid path.
  • each said disk is formed with a plurality of said conduits.

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
US00349169A 1973-04-09 1973-04-09 Fluid flowmeter Ceased US3851526A (en)

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US00349169A US3851526A (en) 1973-04-09 1973-04-09 Fluid flowmeter
JP10130173A JPS543743B2 (enrdf_load_html_response) 1973-04-09 1973-09-10
US06/346,422 USRE31570E (en) 1973-04-09 1982-02-05 Fluid flowmeter

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US00349169A US3851526A (en) 1973-04-09 1973-04-09 Fluid flowmeter

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Cited By (45)

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US4340050A (en) * 1980-12-29 1982-07-20 Delmed Inc. Medical fluid flow rate indicating/controlling device
US4375813A (en) * 1981-02-10 1983-03-08 Delmed, Inc. Medical fluid flow rate controlling device
US4427030A (en) 1981-09-22 1984-01-24 Bronkhorst High-Tech Bv Laminar flow element
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
DE3408779A1 (de) * 1983-09-02 1985-03-21 Tylan Corp., Carson, Calif. Einstellbarer, laminarer durchflussmesser
EP0156271A1 (en) * 1984-03-19 1985-10-02 Honeywell Inc. Condition responsive sensing apparatus
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
US4658855A (en) * 1980-10-03 1987-04-21 Silicon Valley Group Mass flow controller
US4672997A (en) * 1984-10-29 1987-06-16 Btu Engineering Corporation Modular, self-diagnostic mass-flow controller and system
EP0428364A1 (en) * 1989-11-13 1991-05-22 Dxl International Inc. Flowmeter
US5100100A (en) * 1990-09-12 1992-03-31 Mks Instruments, Inc. Fluid control and shut off valve
US5142907A (en) * 1991-04-17 1992-09-01 Mks Instruments, Inc. Constant temperature gradient fluid mass flow transducer
US5357793A (en) * 1992-03-06 1994-10-25 Bronkhorst High-Tech B.V. Fluid metering apparatus
US5461913A (en) * 1994-06-23 1995-10-31 Mks Instruments, Inc. Differential current thermal mass flow transducer
US5511416A (en) * 1993-09-15 1996-04-30 Alicat Scientific, Inc. Wide range laminar flow element
US5576498A (en) * 1995-11-01 1996-11-19 The Rosaen Company Laminar flow element for a flowmeter
US5672821A (en) * 1994-12-12 1997-09-30 Mks Japan, Inc. Laminar flow device
WO1998002686A1 (en) 1996-07-12 1998-01-22 Mks Instruments, Inc. Improved pressure-based mass flow controller
US5763791A (en) * 1995-11-01 1998-06-09 The Rosaen Company Flowmeter
US5804717A (en) * 1996-04-05 1998-09-08 Mks Instruments, Inc. Mass flow transducer having extended flow rate measurement range
US6338277B1 (en) * 1997-06-06 2002-01-15 G. Kromschroder Aktiengesellschaft Flowmeter for attenuating acoustic propagations
US6631334B2 (en) 2000-12-26 2003-10-07 Mks Instruments, Inc. Pressure-based mass flow controller system
US6668641B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal dissipation in a thermal mass flow sensor
US6668642B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal isolation of thermal mass flow sensor
US6779394B2 (en) 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
US20050288873A1 (en) * 2004-06-28 2005-12-29 Nelson Urdaneta Ultrasonic liquid flow controller
US20060005883A1 (en) * 2002-08-28 2006-01-12 Horiba Stec, Co., Ltd. Flow restrictor
WO2005086643A3 (en) * 2004-02-27 2006-04-27 Horiba Stec Co Ltd Flow restrictor
US20060157133A1 (en) * 2005-01-14 2006-07-20 Kurtz Anthony D Combustion transducer apparatus employing pressure restriction means
US20070034016A1 (en) * 2005-08-12 2007-02-15 Celerity, Inc. Ultrasonic flow sensor
US20080041481A1 (en) * 2003-08-28 2008-02-21 Horiba Stec, Co., Ltd. Flow restrictor
EP2455724A1 (de) 2010-11-18 2012-05-23 Axetris AG Flusssensor
US20160084038A1 (en) * 2013-04-29 2016-03-24 Typhonix As Flow and fluid conditioning pressure reducing valve or device
US20170038237A1 (en) * 2014-12-05 2017-02-09 General Electric Company System and method for fluid metering
US9732880B2 (en) 2009-05-27 2017-08-15 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US20170293308A1 (en) * 2016-04-07 2017-10-12 Hitachi Metals, Ltd. Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller
EP3273025A1 (en) * 2016-07-18 2018-01-24 A. de Kock Holding B.V. Laminar flow module
US10941878B2 (en) 2013-03-15 2021-03-09 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US20220347603A1 (en) * 2021-04-30 2022-11-03 Pall Corporation Filter disk segments
US11585444B2 (en) * 2019-08-05 2023-02-21 Ichor Systems, Inc. Seal for a flow restrictor
US11624454B2 (en) * 2019-04-16 2023-04-11 Buerkert Werke Gmbh & Co. Kg Flow resistance insert and a flow rate measuring or flow rate control means
US11639865B2 (en) 2019-08-05 2023-05-02 Ichor Systems, Inc. Laminar flow restrictor
US20230220857A1 (en) * 2022-01-10 2023-07-13 Horiba Stec, Co., Ltd. Flow restrictor for fluid flow device
US11841036B2 (en) 2019-08-05 2023-12-12 Ichor Systems, Inc. Laminar flow restrictor and seal for same

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JPS5810705U (ja) * 1981-07-10 1983-01-24 日本光電工業株式会社 呼吸流量計の抵抗管
JP2007041870A (ja) * 2005-08-03 2007-02-15 Horiba Stec Co Ltd ガス流量制御方法

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US1559547A (en) * 1920-03-25 1925-11-03 Francis H Brown Pressure-responsive device
US1870849A (en) * 1928-06-09 1932-08-09 Hodgson John Lawrence Flow quantity meter
US3071160A (en) * 1959-07-01 1963-01-01 Nat Instr Lab Inc Fluid restrictor for linear flow meters
US3613448A (en) * 1969-11-26 1971-10-19 Teledyne Inc Fluid flow measuring apparatus

Cited By (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4658855A (en) * 1980-10-03 1987-04-21 Silicon Valley Group Mass flow controller
US4340050A (en) * 1980-12-29 1982-07-20 Delmed Inc. Medical fluid flow rate indicating/controlling device
US4375813A (en) * 1981-02-10 1983-03-08 Delmed, Inc. Medical fluid flow rate controlling device
US4427030A (en) 1981-09-22 1984-01-24 Bronkhorst High-Tech Bv Laminar flow element
EP0075343A3 (en) * 1981-09-22 1984-07-04 Bronkhorst High-Tech B.V. Laminar flow element
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
DE3408779A1 (de) * 1983-09-02 1985-03-21 Tylan Corp., Carson, Calif. Einstellbarer, laminarer durchflussmesser
US4524616A (en) * 1983-09-02 1985-06-25 Tylan Corporation Adjustable laminar flow bypass
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
EP0156271A1 (en) * 1984-03-19 1985-10-02 Honeywell Inc. Condition responsive sensing apparatus
US4672997A (en) * 1984-10-29 1987-06-16 Btu Engineering Corporation Modular, self-diagnostic mass-flow controller and system
EP0428364A1 (en) * 1989-11-13 1991-05-22 Dxl International Inc. Flowmeter
US5044199A (en) * 1989-11-13 1991-09-03 Dxl International, Inc. Flowmeter
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