JPS5434682A - Soft xxray lithography mask and method of producing same - Google Patents
Soft xxray lithography mask and method of producing sameInfo
- Publication number
- JPS5434682A JPS5434682A JP10074177A JP10074177A JPS5434682A JP S5434682 A JPS5434682 A JP S5434682A JP 10074177 A JP10074177 A JP 10074177A JP 10074177 A JP10074177 A JP 10074177A JP S5434682 A JPS5434682 A JP S5434682A
- Authority
- JP
- Japan
- Prior art keywords
- xxray
- soft
- producing same
- lithography mask
- lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52100741A JPS6041457B2 (en) | 1977-08-23 | 1977-08-23 | Manufacturing method of mask for soft X-ray lithography |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52100741A JPS6041457B2 (en) | 1977-08-23 | 1977-08-23 | Manufacturing method of mask for soft X-ray lithography |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5434682A true JPS5434682A (en) | 1979-03-14 |
JPS6041457B2 JPS6041457B2 (en) | 1985-09-17 |
Family
ID=14281976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52100741A Expired JPS6041457B2 (en) | 1977-08-23 | 1977-08-23 | Manufacturing method of mask for soft X-ray lithography |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6041457B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55150023U (en) * | 1979-04-16 | 1980-10-29 | ||
JPS5731862U (en) * | 1980-07-30 | 1982-02-19 | ||
JPS6068339A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
JPS6068336A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
-
1977
- 1977-08-23 JP JP52100741A patent/JPS6041457B2/en not_active Expired
Non-Patent Citations (1)
Title |
---|
IEEE TRANSACTION ON ELECTRON DEVICES=1975 * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55150023U (en) * | 1979-04-16 | 1980-10-29 | ||
JPS5731862U (en) * | 1980-07-30 | 1982-02-19 | ||
JPS6068339A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
JPS6068336A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
JPH0563933B2 (en) * | 1983-09-26 | 1993-09-13 | Canon Kk | |
JPH0563932B2 (en) * | 1983-09-26 | 1993-09-13 | Canon Kk |
Also Published As
Publication number | Publication date |
---|---|
JPS6041457B2 (en) | 1985-09-17 |
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