JPS5431287A - Dielectric isolation substrate - Google Patents

Dielectric isolation substrate

Info

Publication number
JPS5431287A
JPS5431287A JP9697577A JP9697577A JPS5431287A JP S5431287 A JPS5431287 A JP S5431287A JP 9697577 A JP9697577 A JP 9697577A JP 9697577 A JP9697577 A JP 9697577A JP S5431287 A JPS5431287 A JP S5431287A
Authority
JP
Japan
Prior art keywords
dielectric isolation
substrate
isolation substrate
free
bottom part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9697577A
Other languages
Japanese (ja)
Other versions
JPS5845182B2 (en
Inventor
Tadahiko Mitsuyoshi
Takeo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9697577A priority Critical patent/JPS5845182B2/en
Publication of JPS5431287A publication Critical patent/JPS5431287A/en
Publication of JPS5845182B2 publication Critical patent/JPS5845182B2/en
Expired legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To obtain a substrate which is free from the evil effect due to the thermal strain or the impurity diffusion even with a high-temperature treatment for the dielectric isolation substrate, by forming the polycrystal layer between the support substrate and the insulator layer at the bottom part of the island region.
COPYRIGHT: (C)1979,JPO&Japio
JP9697577A 1977-08-15 1977-08-15 Dielectric isolation substrate Expired JPS5845182B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9697577A JPS5845182B2 (en) 1977-08-15 1977-08-15 Dielectric isolation substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9697577A JPS5845182B2 (en) 1977-08-15 1977-08-15 Dielectric isolation substrate

Publications (2)

Publication Number Publication Date
JPS5431287A true JPS5431287A (en) 1979-03-08
JPS5845182B2 JPS5845182B2 (en) 1983-10-07

Family

ID=14179206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9697577A Expired JPS5845182B2 (en) 1977-08-15 1977-08-15 Dielectric isolation substrate

Country Status (1)

Country Link
JP (1) JPS5845182B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0799239A (en) * 1993-09-28 1995-04-11 Nec Corp Semiconductor device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0799239A (en) * 1993-09-28 1995-04-11 Nec Corp Semiconductor device and manufacture thereof

Also Published As

Publication number Publication date
JPS5845182B2 (en) 1983-10-07

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