JPS5431287A - Dielectric isolation substrate - Google Patents
Dielectric isolation substrateInfo
- Publication number
- JPS5431287A JPS5431287A JP9697577A JP9697577A JPS5431287A JP S5431287 A JPS5431287 A JP S5431287A JP 9697577 A JP9697577 A JP 9697577A JP 9697577 A JP9697577 A JP 9697577A JP S5431287 A JPS5431287 A JP S5431287A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric isolation
- substrate
- isolation substrate
- free
- bottom part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To obtain a substrate which is free from the evil effect due to the thermal strain or the impurity diffusion even with a high-temperature treatment for the dielectric isolation substrate, by forming the polycrystal layer between the support substrate and the insulator layer at the bottom part of the island region.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9697577A JPS5845182B2 (en) | 1977-08-15 | 1977-08-15 | Dielectric isolation substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9697577A JPS5845182B2 (en) | 1977-08-15 | 1977-08-15 | Dielectric isolation substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5431287A true JPS5431287A (en) | 1979-03-08 |
JPS5845182B2 JPS5845182B2 (en) | 1983-10-07 |
Family
ID=14179206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9697577A Expired JPS5845182B2 (en) | 1977-08-15 | 1977-08-15 | Dielectric isolation substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5845182B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0799239A (en) * | 1993-09-28 | 1995-04-11 | Nec Corp | Semiconductor device and manufacture thereof |
-
1977
- 1977-08-15 JP JP9697577A patent/JPS5845182B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0799239A (en) * | 1993-09-28 | 1995-04-11 | Nec Corp | Semiconductor device and manufacture thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS5845182B2 (en) | 1983-10-07 |
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