JPS5429572A - Plasma unit - Google Patents

Plasma unit

Info

Publication number
JPS5429572A
JPS5429572A JP9468677A JP9468677A JPS5429572A JP S5429572 A JPS5429572 A JP S5429572A JP 9468677 A JP9468677 A JP 9468677A JP 9468677 A JP9468677 A JP 9468677A JP S5429572 A JPS5429572 A JP S5429572A
Authority
JP
Japan
Prior art keywords
plasma unit
bridging
perforated
keeping
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9468677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138608B2 (enrdf_load_stackoverflow
Inventor
Daijiro Kudo
Akira Abiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9468677A priority Critical patent/JPS5429572A/ja
Publication of JPS5429572A publication Critical patent/JPS5429572A/ja
Publication of JPS6138608B2 publication Critical patent/JPS6138608B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP9468677A 1977-08-09 1977-08-09 Plasma unit Granted JPS5429572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9468677A JPS5429572A (en) 1977-08-09 1977-08-09 Plasma unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9468677A JPS5429572A (en) 1977-08-09 1977-08-09 Plasma unit

Publications (2)

Publication Number Publication Date
JPS5429572A true JPS5429572A (en) 1979-03-05
JPS6138608B2 JPS6138608B2 (enrdf_load_stackoverflow) 1986-08-30

Family

ID=14117074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9468677A Granted JPS5429572A (en) 1977-08-09 1977-08-09 Plasma unit

Country Status (1)

Country Link
JP (1) JPS5429572A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687323A (en) * 1979-12-19 1981-07-15 Pioneer Electronic Corp Substrate supporting device of plasma reaction tube
JPS63143807A (ja) * 1986-12-08 1988-06-16 Mitsui Toatsu Chem Inc 成膜装置
JPS63143809A (ja) * 1986-12-08 1988-06-16 Mitsui Toatsu Chem Inc 薄膜形成用装置
JPS63143808A (ja) * 1986-12-08 1988-06-16 Mitsui Toatsu Chem Inc 薄膜形成装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511732U (enrdf_load_stackoverflow) * 1974-06-19 1976-01-08
JPS5216482A (en) * 1975-07-30 1977-02-07 Toshiba Corp Surface treatment apparatus using activated gas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511732U (enrdf_load_stackoverflow) * 1974-06-19 1976-01-08
JPS5216482A (en) * 1975-07-30 1977-02-07 Toshiba Corp Surface treatment apparatus using activated gas

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687323A (en) * 1979-12-19 1981-07-15 Pioneer Electronic Corp Substrate supporting device of plasma reaction tube
JPS63143807A (ja) * 1986-12-08 1988-06-16 Mitsui Toatsu Chem Inc 成膜装置
JPS63143809A (ja) * 1986-12-08 1988-06-16 Mitsui Toatsu Chem Inc 薄膜形成用装置
JPS63143808A (ja) * 1986-12-08 1988-06-16 Mitsui Toatsu Chem Inc 薄膜形成装置

Also Published As

Publication number Publication date
JPS6138608B2 (enrdf_load_stackoverflow) 1986-08-30

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