JPS53112669A - Plasma etching unit - Google Patents
Plasma etching unitInfo
- Publication number
- JPS53112669A JPS53112669A JP2696877A JP2696877A JPS53112669A JP S53112669 A JPS53112669 A JP S53112669A JP 2696877 A JP2696877 A JP 2696877A JP 2696877 A JP2696877 A JP 2696877A JP S53112669 A JPS53112669 A JP S53112669A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plasma etching
- etching unit
- concentricly
- accommodation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To increase the capability of accommodation, by constituting the sputtering electrode through arrangement concentricly of the polygonal electrode having parallel surfaces to the opposing direction to the electrode in the plasma space taken place with the electrode.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2696877A JPS6058578B2 (en) | 1977-03-14 | 1977-03-14 | plasma etching equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2696877A JPS6058578B2 (en) | 1977-03-14 | 1977-03-14 | plasma etching equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53112669A true JPS53112669A (en) | 1978-10-02 |
JPS6058578B2 JPS6058578B2 (en) | 1985-12-20 |
Family
ID=12207945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2696877A Expired JPS6058578B2 (en) | 1977-03-14 | 1977-03-14 | plasma etching equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6058578B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04102320A (en) * | 1990-08-22 | 1992-04-03 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1977
- 1977-03-14 JP JP2696877A patent/JPS6058578B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04102320A (en) * | 1990-08-22 | 1992-04-03 | Fujitsu Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6058578B2 (en) | 1985-12-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52119494A (en) | Control of ozonizer system | |
JPS53112669A (en) | Plasma etching unit | |
JPS5390928A (en) | Telephoto lens | |
JPS5390840A (en) | Arithmetic processor of microprogram control | |
JPS5384439A (en) | Multiple control unit | |
JPS53128227A (en) | Multiple switch | |
JPS5429572A (en) | Plasma unit | |
JPS5382136A (en) | Crt display unit | |
JPS5346222A (en) | Solid state pick up unit | |
JPS5313869A (en) | Cathode ray tube | |
JPS5429529A (en) | Electromagnetic tablet unit | |
JPS5317058A (en) | Gas discharge panel | |
JPS53106558A (en) | Voltage division circuit | |
JPS5357741A (en) | Magnetron | |
JPS5235979A (en) | Plane discharge display element | |
JPS5418292A (en) | Photoconductive target | |
JPS5419375A (en) | Semiconductor device | |
JPS523490A (en) | Monitor of radiation energy | |
JPS5336433A (en) | Display system | |
JPS5418291A (en) | Photoconductive target | |
JPS53140516A (en) | Motor | |
JPS52127718A (en) | Character display unit | |
JPS5434172A (en) | Electromagnetic-shielding dust-proof constant-temperature chamber | |
JPS53105365A (en) | Discharge display unit | |
JPS5419689A (en) | Construction of solar batteries |