JPS5427708B2 - - Google Patents

Info

Publication number
JPS5427708B2
JPS5427708B2 JP15077176A JP15077176A JPS5427708B2 JP S5427708 B2 JPS5427708 B2 JP S5427708B2 JP 15077176 A JP15077176 A JP 15077176A JP 15077176 A JP15077176 A JP 15077176A JP S5427708 B2 JPS5427708 B2 JP S5427708B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15077176A
Other versions
JPS5375768A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15077176A priority Critical patent/JPS5375768A/ja
Publication of JPS5375768A publication Critical patent/JPS5375768A/ja
Publication of JPS5427708B2 publication Critical patent/JPS5427708B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15077176A 1976-12-17 1976-12-17 Size check pattern Granted JPS5375768A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15077176A JPS5375768A (en) 1976-12-17 1976-12-17 Size check pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15077176A JPS5375768A (en) 1976-12-17 1976-12-17 Size check pattern

Publications (2)

Publication Number Publication Date
JPS5375768A JPS5375768A (en) 1978-07-05
JPS5427708B2 true JPS5427708B2 (ja) 1979-09-11

Family

ID=15504051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15077176A Granted JPS5375768A (en) 1976-12-17 1976-12-17 Size check pattern

Country Status (1)

Country Link
JP (1) JPS5375768A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55147304A (en) * 1979-05-04 1980-11-17 Nec Corp Monitoring method of quantity of change in shape
JPH0669031B2 (ja) * 1984-07-17 1994-08-31 日本電気株式会社 半導体装置
JPH07111953B2 (ja) * 1988-12-13 1995-11-29 富士通株式会社 ホトリソグラフィのパターン寸法管理方法
JPH0727858B2 (ja) * 1990-12-14 1995-03-29 セイコーエプソン株式会社 レジストパターンの評価方法

Also Published As

Publication number Publication date
JPS5375768A (en) 1978-07-05

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