JPS542544B2 - - Google Patents

Info

Publication number
JPS542544B2
JPS542544B2 JP5450977A JP5450977A JPS542544B2 JP S542544 B2 JPS542544 B2 JP S542544B2 JP 5450977 A JP5450977 A JP 5450977A JP 5450977 A JP5450977 A JP 5450977A JP S542544 B2 JPS542544 B2 JP S542544B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5450977A
Other versions
JPS52149071A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS52149071A publication Critical patent/JPS52149071A/ja
Publication of JPS542544B2 publication Critical patent/JPS542544B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/02—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by suction means
    • B66C1/0212—Circular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/02—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by suction means
    • B66C1/0231—Special lip configurations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/02—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by suction means
    • B66C1/0256—Operating and control devices
    • B66C1/0268—Venturi effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Feeding Of Workpieces (AREA)
JP5450977A 1976-06-02 1977-05-13 Improved bernoulli pickup head for automatically returning and preventing inclination thereof Granted JPS52149071A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/692,068 US4029351A (en) 1976-06-02 1976-06-02 Bernoulli pickup head with self-restoring anti-tilt improvement

Publications (2)

Publication Number Publication Date
JPS52149071A JPS52149071A (en) 1977-12-10
JPS542544B2 true JPS542544B2 (ja) 1979-02-08

Family

ID=24779115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5450977A Granted JPS52149071A (en) 1976-06-02 1977-05-13 Improved bernoulli pickup head for automatically returning and preventing inclination thereof

Country Status (5)

Country Link
US (1) US4029351A (ja)
JP (1) JPS52149071A (ja)
DE (1) DE2722442A1 (ja)
FR (1) FR2353467A1 (ja)
GB (1) GB1524499A (ja)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4257637A (en) * 1979-09-28 1981-03-24 International Business Machines Corporation Contactless air film lifting device
DE3300046C2 (de) * 1982-01-04 1985-12-19 Vsesojusn'ij naučno-issledovatelskij institut Gosnaka, Moskva Vorrichtung zum Zählen von gestapelten Papierbogen
US4474397A (en) * 1982-11-16 1984-10-02 International Business Machines Corporation Pick-up head utilizing aspirated air flow
US4604024A (en) * 1984-11-26 1986-08-05 General Motors Corporation Washer pick up and placement tool
US5067762A (en) * 1985-06-18 1991-11-26 Hiroshi Akashi Non-contact conveying device
US5080549A (en) * 1987-05-11 1992-01-14 Epsilon Technology, Inc. Wafer handling system with Bernoulli pick-up
US4773687A (en) * 1987-05-22 1988-09-27 American Telephone And Telegraph Company, At&T Technologies, Inc. Wafer handler
EP0419461B1 (en) * 1988-06-17 1998-09-02 Advanced Semiconductor Materials America, Inc. Wafer handling system with bernoulli pick-up
US5470420A (en) * 1992-07-31 1995-11-28 Eastman Kodak Company Apparatus for label application using Bernoulli Effect
US5665430A (en) * 1992-09-30 1997-09-09 The United States Of America As Represented By The Secretary Of The Navy Chemical vapor deposition method for depositing diamond using a high temperature vacuum substrate mount
EP0611273B1 (de) * 1993-02-08 1998-09-16 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG Träger für scheibenförmige Gegenstände
JPH08264626A (ja) * 1994-04-28 1996-10-11 Hitachi Ltd 試料保持方法及び試料表面の流体処理方法並びにそれらの装置
US5979475A (en) * 1994-04-28 1999-11-09 Hitachi, Ltd. Specimen holding method and fluid treatment method of specimen surface and systems therefor
WO1997045862A1 (en) * 1996-05-31 1997-12-04 Ipec Precision, Inc. Non-contact holder for wafer-like articles
US6183183B1 (en) * 1997-01-16 2001-02-06 Asm America, Inc. Dual arm linear hand-off wafer transfer assembly
US5834731A (en) * 1997-06-04 1998-11-10 Hmt Technology Corporation Laser texturing apparatus with bernoulli holder
US6168697B1 (en) 1998-03-10 2001-01-02 Trusi Technologies Llc Holders suitable to hold articles during processing and article processing methods
US6095582A (en) * 1998-03-11 2000-08-01 Trusi Technologies, Llc Article holders and holding methods
WO1999064209A1 (fr) * 1998-06-08 1999-12-16 Kuraitekku Co., Ltd. Coupelle de retenue et d'aspiration pour matiere lamellaire
JP4391655B2 (ja) 2000-02-22 2009-12-24 インターナショナル・ビジネス・マシーンズ・コーポレーション エアピンセット
US6631935B1 (en) * 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects
KR100387524B1 (ko) * 2001-01-26 2003-06-18 삼성전자주식회사 반도체 웨이퍼 위치 상태 감지 시스템과 이를 이용하는 반도체장치 제조 설비 및 그에 따른 웨이퍼 위치 상태 감지방법
US6638004B2 (en) 2001-07-13 2003-10-28 Tru-Si Technologies, Inc. Article holders and article positioning methods
US6615113B2 (en) 2001-07-13 2003-09-02 Tru-Si Technologies, Inc. Articles holders with sensors detecting a type of article held by the holder
US6935830B2 (en) * 2001-07-13 2005-08-30 Tru-Si Technologies, Inc. Alignment of semiconductor wafers and other articles
DE20115549U1 (de) 2001-09-21 2001-12-06 FESTO AG & Co., 73734 Esslingen Vakuumhandhabungsvorrichtung
US20060234336A1 (en) * 2001-11-30 2006-10-19 Miguez Carlos B Methylotrophic bacterium for the production of recombinant proteins and other products
DE10254762A1 (de) * 2002-11-22 2004-06-09 Transcoject Gesellschaft für medizinische Geräte mbH & Co. KG Verfahren zur Herstellung und/oder Handhabung eines hochreinen Gegenstandes
DE10321874A1 (de) * 2003-05-15 2004-12-02 Festo Ag & Co. Kg Vorrichtung zum Umsetzen von Gegenständen
JP4437415B2 (ja) * 2004-03-03 2010-03-24 リンク・パワー株式会社 非接触保持装置および非接触保持搬送装置
DE102005019330A1 (de) * 2005-04-26 2006-11-09 Leica Microsystems Semiconductor Gmbh Transportsystem für ein scheibenförmiges Objekt und System zur Inspektion eines scheibenförmigen Objekts
JP4642787B2 (ja) * 2006-05-09 2011-03-02 東京エレクトロン株式会社 基板搬送装置及び縦型熱処理装置
US7637713B1 (en) * 2007-02-13 2009-12-29 Cinram International Inc. Apparatus and method for separating topmost disc-like object from a stack
DE102008041250A1 (de) * 2008-08-13 2010-02-25 Ers Electronic Gmbh Verfahren und Vorrichtung zum thermischen Bearbeiten von Kunststoffscheiben, insbesondere Moldwafern
US8231157B2 (en) 2008-08-28 2012-07-31 Corning Incorporated Non-contact manipulating devices and methods
JP5110480B2 (ja) * 2010-05-11 2012-12-26 Ｓｍｃ株式会社 非接触搬送装置
KR101157542B1 (ko) 2012-04-26 2012-06-22 한국뉴매틱(주) 인-라인 진공펌프
JP6186124B2 (ja) * 2012-12-14 2017-08-23 東京応化工業株式会社 搬送アーム、搬送装置および搬送方法
US9929121B2 (en) * 2015-08-31 2018-03-27 Kulicke And Soffa Industries, Inc. Bonding machines for bonding semiconductor elements, methods of operating bonding machines, and techniques for improving UPH on such bonding machines
USD803283S1 (en) 2016-05-16 2017-11-21 Veeco Instruments Inc. Wafer handling assembly
CA3078775A1 (en) * 2017-11-01 2019-05-09 Alcon Inc. Bernoulli gripper for intraocular and contact lenses

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523706A (en) * 1967-10-27 1970-08-11 Ibm Apparatus for supporting articles without structural contact and for positioning the supported articles
JPS487640U (ja) * 1971-06-10 1973-01-27

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3438668A (en) * 1965-08-26 1969-04-15 Gen Electric Contactless lifter
US3466079A (en) * 1965-09-08 1969-09-09 Western Electric Co Pressurized fluid pickup device
US3539216A (en) * 1968-01-11 1970-11-10 Sprague Electric Co Pickup device
US3517958A (en) * 1968-06-17 1970-06-30 Ibm Vacuum pick-up with air shield

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523706A (en) * 1967-10-27 1970-08-11 Ibm Apparatus for supporting articles without structural contact and for positioning the supported articles
JPS487640U (ja) * 1971-06-10 1973-01-27

Also Published As

Publication number Publication date
GB1524499A (en) 1978-09-13
FR2353467B1 (ja) 1980-11-28
FR2353467A1 (fr) 1977-12-30
DE2722442A1 (de) 1977-12-15
JPS52149071A (en) 1977-12-10
US4029351A (en) 1977-06-14

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