Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication date
Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP8242377ApriorityCriticalpatent/JPS5417680A/en
Publication of JPS5417680ApublicationCriticalpatent/JPS5417680A/en
PURPOSE: To manufacture a SIT with excellent high-frequency performance, by forming a SiO2 film by sputtering the n+ epitaxial layer surface of a substrate at a high frequency and by obtaining a gate film by decreasing impurity density.
COPYRIGHT: (C)1979,JPO&Japio
JP8242377A1977-07-081977-07-08Manufacture of electrostatic induction type transistor
PendingJPS5417680A
(en)