JPS54161277A - Plasma etching method - Google Patents

Plasma etching method

Info

Publication number
JPS54161277A
JPS54161277A JP7010078A JP7010078A JPS54161277A JP S54161277 A JPS54161277 A JP S54161277A JP 7010078 A JP7010078 A JP 7010078A JP 7010078 A JP7010078 A JP 7010078A JP S54161277 A JPS54161277 A JP S54161277A
Authority
JP
Japan
Prior art keywords
plasma etching
etching method
plasma
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7010078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6258142B2 (enExample
Inventor
Hideaki Itakura
Hiroyoshi Komiya
Hiroyasu Toyoda
Mineto Tobinaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP7010078A priority Critical patent/JPS54161277A/ja
Publication of JPS54161277A publication Critical patent/JPS54161277A/ja
Publication of JPS6258142B2 publication Critical patent/JPS6258142B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP7010078A 1978-06-09 1978-06-09 Plasma etching method Granted JPS54161277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7010078A JPS54161277A (en) 1978-06-09 1978-06-09 Plasma etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7010078A JPS54161277A (en) 1978-06-09 1978-06-09 Plasma etching method

Publications (2)

Publication Number Publication Date
JPS54161277A true JPS54161277A (en) 1979-12-20
JPS6258142B2 JPS6258142B2 (enExample) 1987-12-04

Family

ID=13421767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7010078A Granted JPS54161277A (en) 1978-06-09 1978-06-09 Plasma etching method

Country Status (1)

Country Link
JP (1) JPS54161277A (enExample)

Also Published As

Publication number Publication date
JPS6258142B2 (enExample) 1987-12-04

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