JPS5415682A - Manufacture of field effect semiconductor device - Google Patents

Manufacture of field effect semiconductor device

Info

Publication number
JPS5415682A
JPS5415682A JP8131077A JP8131077A JPS5415682A JP S5415682 A JPS5415682 A JP S5415682A JP 8131077 A JP8131077 A JP 8131077A JP 8131077 A JP8131077 A JP 8131077A JP S5415682 A JPS5415682 A JP S5415682A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
field effect
effect semiconductor
oxidizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8131077A
Other languages
Japanese (ja)
Inventor
Masahide Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8131077A priority Critical patent/JPS5415682A/en
Publication of JPS5415682A publication Critical patent/JPS5415682A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To manufacture a Schottky barrier FET by oxidizing the GaAs itself through the anodized method and then using the oxide film for the surface protective film.
COPYRIGHT: (C)1979,JPO&Japio
JP8131077A 1977-07-06 1977-07-06 Manufacture of field effect semiconductor device Pending JPS5415682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8131077A JPS5415682A (en) 1977-07-06 1977-07-06 Manufacture of field effect semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8131077A JPS5415682A (en) 1977-07-06 1977-07-06 Manufacture of field effect semiconductor device

Publications (1)

Publication Number Publication Date
JPS5415682A true JPS5415682A (en) 1979-02-05

Family

ID=13742816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8131077A Pending JPS5415682A (en) 1977-07-06 1977-07-06 Manufacture of field effect semiconductor device

Country Status (1)

Country Link
JP (1) JPS5415682A (en)

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