JPS54142071A - Method of fabricating xxray exposure mask - Google Patents
Method of fabricating xxray exposure maskInfo
- Publication number
- JPS54142071A JPS54142071A JP5041178A JP5041178A JPS54142071A JP S54142071 A JPS54142071 A JP S54142071A JP 5041178 A JP5041178 A JP 5041178A JP 5041178 A JP5041178 A JP 5041178A JP S54142071 A JPS54142071 A JP S54142071A
- Authority
- JP
- Japan
- Prior art keywords
- xxray
- fabricating
- exposure mask
- mask
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5041178A JPS54142071A (en) | 1978-04-27 | 1978-04-27 | Method of fabricating xxray exposure mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5041178A JPS54142071A (en) | 1978-04-27 | 1978-04-27 | Method of fabricating xxray exposure mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54142071A true JPS54142071A (en) | 1979-11-05 |
Family
ID=12858113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5041178A Pending JPS54142071A (en) | 1978-04-27 | 1978-04-27 | Method of fabricating xxray exposure mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54142071A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62190340U (en) * | 1986-05-26 | 1987-12-03 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53104176A (en) * | 1977-02-24 | 1978-09-11 | Oki Electric Ind Co Ltd | Mask for x-ray exposure |
-
1978
- 1978-04-27 JP JP5041178A patent/JPS54142071A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53104176A (en) * | 1977-02-24 | 1978-09-11 | Oki Electric Ind Co Ltd | Mask for x-ray exposure |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62190340U (en) * | 1986-05-26 | 1987-12-03 |
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