JPS54124977A - Xxray exposure mask - Google Patents
Xxray exposure maskInfo
- Publication number
- JPS54124977A JPS54124977A JP3330878A JP3330878A JPS54124977A JP S54124977 A JPS54124977 A JP S54124977A JP 3330878 A JP3330878 A JP 3330878A JP 3330878 A JP3330878 A JP 3330878A JP S54124977 A JPS54124977 A JP S54124977A
- Authority
- JP
- Japan
- Prior art keywords
- xxray
- exposure mask
- mask
- exposure
- xxray exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3330878A JPS54124977A (en) | 1978-03-23 | 1978-03-23 | Xxray exposure mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3330878A JPS54124977A (en) | 1978-03-23 | 1978-03-23 | Xxray exposure mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54124977A true JPS54124977A (en) | 1979-09-28 |
Family
ID=12382920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3330878A Pending JPS54124977A (en) | 1978-03-23 | 1978-03-23 | Xxray exposure mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54124977A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6068336A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
JPS6068339A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
JPH04330711A (en) * | 1991-01-31 | 1992-11-18 | Hoya Corp | Material for x-ray mask |
-
1978
- 1978-03-23 JP JP3330878A patent/JPS54124977A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6068336A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
JPS6068339A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
JPH0563932B2 (en) * | 1983-09-26 | 1993-09-13 | Canon Kk | |
JPH0563933B2 (en) * | 1983-09-26 | 1993-09-13 | Canon Kk | |
JPH04330711A (en) * | 1991-01-31 | 1992-11-18 | Hoya Corp | Material for x-ray mask |
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