JPS54124977A - Xxray exposure mask - Google Patents

Xxray exposure mask

Info

Publication number
JPS54124977A
JPS54124977A JP3330878A JP3330878A JPS54124977A JP S54124977 A JPS54124977 A JP S54124977A JP 3330878 A JP3330878 A JP 3330878A JP 3330878 A JP3330878 A JP 3330878A JP S54124977 A JPS54124977 A JP S54124977A
Authority
JP
Japan
Prior art keywords
xxray
exposure mask
mask
exposure
xxray exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3330878A
Other languages
Japanese (ja)
Inventor
Tetsunori Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP3330878A priority Critical patent/JPS54124977A/en
Publication of JPS54124977A publication Critical patent/JPS54124977A/en
Pending legal-status Critical Current

Links

JP3330878A 1978-03-23 1978-03-23 Xxray exposure mask Pending JPS54124977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3330878A JPS54124977A (en) 1978-03-23 1978-03-23 Xxray exposure mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3330878A JPS54124977A (en) 1978-03-23 1978-03-23 Xxray exposure mask

Publications (1)

Publication Number Publication Date
JPS54124977A true JPS54124977A (en) 1979-09-28

Family

ID=12382920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3330878A Pending JPS54124977A (en) 1978-03-23 1978-03-23 Xxray exposure mask

Country Status (1)

Country Link
JP (1) JPS54124977A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068336A (en) * 1983-09-26 1985-04-18 Canon Inc Structural body of mask for lithography
JPS6068339A (en) * 1983-09-26 1985-04-18 Canon Inc Structural body of mask for lithography
JPH04330711A (en) * 1991-01-31 1992-11-18 Hoya Corp Material for x-ray mask

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068336A (en) * 1983-09-26 1985-04-18 Canon Inc Structural body of mask for lithography
JPS6068339A (en) * 1983-09-26 1985-04-18 Canon Inc Structural body of mask for lithography
JPH0563932B2 (en) * 1983-09-26 1993-09-13 Canon Kk
JPH0563933B2 (en) * 1983-09-26 1993-09-13 Canon Kk
JPH04330711A (en) * 1991-01-31 1992-11-18 Hoya Corp Material for x-ray mask

Similar Documents

Publication Publication Date Title
GB2039073B (en) Photosensitive compositions
JPS5532095A (en) Stabilizing resist image
JPS5593147A (en) Exposure adjustment
GB2012452B (en) Lithography
JPS5521988A (en) Dustproof mask
GB2035581B (en) Camera exposure control
GB2038011B (en) Photocopying
JPS54104902A (en) Lighttintercepting mask film
JPS54125024A (en) Photosensitive composition
JPS54116218A (en) Photosensitive composition
DE2964020D1 (en) Photosensitive composition
GB2088084B (en) Pattern exposure mask
GB2038716B (en) Photocopying
JPS54110826A (en) Mask cover
GB2036347B (en) Projection printing
GB2015884B (en) Face mask
JPS54124977A (en) Xxray exposure mask
GB2028522B (en) Photographic printing
GB2056099B (en) Contact exposure
JPS53134367A (en) Xxray mask
JPS5543592A (en) Exposure device
JPS54141571A (en) Mask for soft xxray lithograph
HK21078A (en) Masaging mask
JPS5441132A (en) Mask for xxray exposure
JPS54126019A (en) Photosensitive composition