JPS54141661A - Assignment system of inspection area - Google Patents

Assignment system of inspection area

Info

Publication number
JPS54141661A
JPS54141661A JP4922378A JP4922378A JPS54141661A JP S54141661 A JPS54141661 A JP S54141661A JP 4922378 A JP4922378 A JP 4922378A JP 4922378 A JP4922378 A JP 4922378A JP S54141661 A JPS54141661 A JP S54141661A
Authority
JP
Japan
Prior art keywords
inspection area
mask
inspection
area
area mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4922378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS638417B2 (enrdf_load_stackoverflow
Inventor
Masahito Nakajima
Katsumi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4922378A priority Critical patent/JPS54141661A/ja
Publication of JPS54141661A publication Critical patent/JPS54141661A/ja
Publication of JPS638417B2 publication Critical patent/JPS638417B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP4922378A 1978-04-27 1978-04-27 Assignment system of inspection area Granted JPS54141661A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4922378A JPS54141661A (en) 1978-04-27 1978-04-27 Assignment system of inspection area

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4922378A JPS54141661A (en) 1978-04-27 1978-04-27 Assignment system of inspection area

Publications (2)

Publication Number Publication Date
JPS54141661A true JPS54141661A (en) 1979-11-05
JPS638417B2 JPS638417B2 (enrdf_load_stackoverflow) 1988-02-23

Family

ID=12824926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4922378A Granted JPS54141661A (en) 1978-04-27 1978-04-27 Assignment system of inspection area

Country Status (1)

Country Link
JP (1) JPS54141661A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920840A (ja) * 1982-07-28 1984-02-02 Fujitsu Ltd 欠陥検査装置
JP2007121290A (ja) * 2005-10-24 2007-05-17 General Electric Co <Ge> マスク生成方法および装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03130420U (enrdf_load_stackoverflow) * 1990-04-11 1991-12-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920840A (ja) * 1982-07-28 1984-02-02 Fujitsu Ltd 欠陥検査装置
JP2007121290A (ja) * 2005-10-24 2007-05-17 General Electric Co <Ge> マスク生成方法および装置

Also Published As

Publication number Publication date
JPS638417B2 (enrdf_load_stackoverflow) 1988-02-23

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