JPS5413751B2 - - Google Patents
Info
- Publication number
- JPS5413751B2 JPS5413751B2 JP13143876A JP13143876A JPS5413751B2 JP S5413751 B2 JPS5413751 B2 JP S5413751B2 JP 13143876 A JP13143876 A JP 13143876A JP 13143876 A JP13143876 A JP 13143876A JP S5413751 B2 JPS5413751 B2 JP S5413751B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13143876A JPS5355983A (en) | 1976-10-31 | 1976-10-31 | Automatic micro defect detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13143876A JPS5355983A (en) | 1976-10-31 | 1976-10-31 | Automatic micro defect detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5355983A JPS5355983A (en) | 1978-05-20 |
| JPS5413751B2 true JPS5413751B2 (un) | 1979-06-01 |
Family
ID=15057957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13143876A Granted JPS5355983A (en) | 1976-10-31 | 1976-10-31 | Automatic micro defect detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5355983A (un) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122980A (en) * | 1978-03-16 | 1979-09-22 | Nec Corp | Surface inspection unit for semiconductor pellet |
| JPS55102233A (en) * | 1979-01-30 | 1980-08-05 | Matsushita Electric Ind Co Ltd | Removing method of dust |
| JPS5685834A (en) * | 1979-12-17 | 1981-07-13 | Nec Corp | External appearance inspecting device for semiconductor substrate |
| JPS56150827A (en) * | 1980-04-25 | 1981-11-21 | Hitachi Ltd | Inspection device for abnormality of mask |
| JPS58105152A (ja) * | 1981-12-17 | 1983-06-22 | Telmec Co Ltd | フオトリソグラフイ−焼付け装置に於ける原版の塵埃除去装置 |
| JPS58179303A (ja) * | 1982-04-14 | 1983-10-20 | Matsushita Electric Ind Co Ltd | 表面微小観察装置 |
| JPS60101942A (ja) * | 1983-11-07 | 1985-06-06 | Mitsubishi Chem Ind Ltd | 単結晶表面のエツチピツトの測定方法およびそのための装置 |
| JPS6313043A (ja) * | 1986-07-04 | 1988-01-20 | Fuji Electric Co Ltd | 自動画像検査機 |
-
1976
- 1976-10-31 JP JP13143876A patent/JPS5355983A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5355983A (en) | 1978-05-20 |