JPS54132500A - Manufacture of silicon nitride powder - Google Patents

Manufacture of silicon nitride powder

Info

Publication number
JPS54132500A
JPS54132500A JP4012678A JP4012678A JPS54132500A JP S54132500 A JPS54132500 A JP S54132500A JP 4012678 A JP4012678 A JP 4012678A JP 4012678 A JP4012678 A JP 4012678A JP S54132500 A JPS54132500 A JP S54132500A
Authority
JP
Japan
Prior art keywords
manufacture
silicon nitride
nitride powder
powder
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4012678A
Other languages
English (en)
Other versions
JPS632885B2 (ja
Inventor
Toshirou Kagami
Hideyasu Matsuo
Masaaki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP4012678A priority Critical patent/JPS54132500A/ja
Publication of JPS54132500A publication Critical patent/JPS54132500A/ja
Publication of JPS632885B2 publication Critical patent/JPS632885B2/ja
Granted legal-status Critical Current

Links

JP4012678A 1978-04-05 1978-04-05 Manufacture of silicon nitride powder Granted JPS54132500A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4012678A JPS54132500A (en) 1978-04-05 1978-04-05 Manufacture of silicon nitride powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4012678A JPS54132500A (en) 1978-04-05 1978-04-05 Manufacture of silicon nitride powder

Publications (2)

Publication Number Publication Date
JPS54132500A true JPS54132500A (en) 1979-10-15
JPS632885B2 JPS632885B2 (ja) 1988-01-21

Family

ID=12572115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4012678A Granted JPS54132500A (en) 1978-04-05 1978-04-05 Manufacture of silicon nitride powder

Country Status (1)

Country Link
JP (1) JPS54132500A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913611A (ja) * 1982-07-08 1984-01-24 Fumio Hori Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置
JPS60200813A (ja) * 1984-03-22 1985-10-11 Mitsubishi Gas Chem Co Inc 窒化珪素と炭化珪素との複合微粉末の製造方法
JPS60235707A (ja) * 1984-05-08 1985-11-22 Mitsubishi Gas Chem Co Inc 複合微粉末の製造方法
JPS62182105A (ja) * 1985-10-17 1987-08-10 バイエル・アクチエンゲゼルシヤフト 改良された窒化珪素及びその製造法
US5176893A (en) * 1989-10-02 1993-01-05 Phillips Petroleum Company Silicon nitride products and method for their production
US5470446A (en) * 1993-04-01 1995-11-28 Tioxide Specialties Limited Process for the production of silicon nitride
JP2017511295A (ja) * 2014-04-14 2017-04-20 オーシーアイ カンパニー リミテッドＯＣＩ Ｃｏｍｐａｎｙ Ｌｔｄ． 粒子の大きさの均一度を向上させた連続式窒化珪素の製造装置及び製造方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913611A (ja) * 1982-07-08 1984-01-24 Fumio Hori Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置
JPS6135121B2 (ja) * 1982-07-08 1986-08-11 Fumio Hori
JPS60200813A (ja) * 1984-03-22 1985-10-11 Mitsubishi Gas Chem Co Inc 窒化珪素と炭化珪素との複合微粉末の製造方法
JPH0454609B2 (ja) * 1984-03-22 1992-08-31 Mitsubishi Gas Chemical Co
JPS60235707A (ja) * 1984-05-08 1985-11-22 Mitsubishi Gas Chem Co Inc 複合微粉末の製造方法
JPH0454610B2 (ja) * 1984-05-08 1992-08-31 Mitsubishi Gas Chemical Co
JPS62182105A (ja) * 1985-10-17 1987-08-10 バイエル・アクチエンゲゼルシヤフト 改良された窒化珪素及びその製造法
US5176893A (en) * 1989-10-02 1993-01-05 Phillips Petroleum Company Silicon nitride products and method for their production
US5470446A (en) * 1993-04-01 1995-11-28 Tioxide Specialties Limited Process for the production of silicon nitride
JP2017511295A (ja) * 2014-04-14 2017-04-20 オーシーアイ カンパニー リミテッドＯＣＩ Ｃｏｍｐａｎｙ Ｌｔｄ． 粒子の大きさの均一度を向上させた連続式窒化珪素の製造装置及び製造方法

Also Published As

Publication number Publication date
JPS632885B2 (ja) 1988-01-21

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