JPS54132164A - Device for fabricating semiconductor - Google Patents

Device for fabricating semiconductor

Info

Publication number
JPS54132164A
JPS54132164A JP4012578A JP4012578A JPS54132164A JP S54132164 A JPS54132164 A JP S54132164A JP 4012578 A JP4012578 A JP 4012578A JP 4012578 A JP4012578 A JP 4012578A JP S54132164 A JPS54132164 A JP S54132164A
Authority
JP
Japan
Prior art keywords
fabricating semiconductor
fabricating
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4012578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5758771B2 (OSRAM
Inventor
Toshirou Kagami
Akio Karita
Hideyasu Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP4012578A priority Critical patent/JPS54132164A/ja
Publication of JPS54132164A publication Critical patent/JPS54132164A/ja
Publication of JPS5758771B2 publication Critical patent/JPS5758771B2/ja
Granted legal-status Critical Current

Links

JP4012578A 1978-04-05 1978-04-05 Device for fabricating semiconductor Granted JPS54132164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4012578A JPS54132164A (en) 1978-04-05 1978-04-05 Device for fabricating semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4012578A JPS54132164A (en) 1978-04-05 1978-04-05 Device for fabricating semiconductor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57121053A Division JPS5825244A (ja) 1982-07-12 1982-07-12 半導体製造用装置

Publications (2)

Publication Number Publication Date
JPS54132164A true JPS54132164A (en) 1979-10-13
JPS5758771B2 JPS5758771B2 (OSRAM) 1982-12-11

Family

ID=12572090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4012578A Granted JPS54132164A (en) 1978-04-05 1978-04-05 Device for fabricating semiconductor

Country Status (1)

Country Link
JP (1) JPS54132164A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6296349A (ja) * 1985-10-22 1987-05-02 Toshiba Ceramics Co Ltd 半導体熱処理用石英ガラス反応管
JP2023506400A (ja) * 2019-12-03 2023-02-16 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 少なくとも１つの半導体基板を処理するための装置および方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62294763A (ja) * 1986-06-13 1987-12-22 Tokyo Gasket Kogyo Kk インジエクシヨン・ノズル用シ−ルガスケツト

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5352368A (en) * 1976-10-25 1978-05-12 Hitachi Ltd Quartz tube for furnace
JPS5490968A (en) * 1977-12-27 1979-07-19 Toshiba Ceramics Co Semiconductor diffusion furnace reactive tube

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5352368A (en) * 1976-10-25 1978-05-12 Hitachi Ltd Quartz tube for furnace
JPS5490968A (en) * 1977-12-27 1979-07-19 Toshiba Ceramics Co Semiconductor diffusion furnace reactive tube

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6296349A (ja) * 1985-10-22 1987-05-02 Toshiba Ceramics Co Ltd 半導体熱処理用石英ガラス反応管
JP2023506400A (ja) * 2019-12-03 2023-02-16 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 少なくとも１つの半導体基板を処理するための装置および方法

Also Published As

Publication number Publication date
JPS5758771B2 (OSRAM) 1982-12-11

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