JPS54132164A - Device for fabricating semiconductor - Google Patents
Device for fabricating semiconductorInfo
- Publication number
- JPS54132164A JPS54132164A JP4012578A JP4012578A JPS54132164A JP S54132164 A JPS54132164 A JP S54132164A JP 4012578 A JP4012578 A JP 4012578A JP 4012578 A JP4012578 A JP 4012578A JP S54132164 A JPS54132164 A JP S54132164A
- Authority
- JP
- Japan
- Prior art keywords
- fabricating semiconductor
- fabricating
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4012578A JPS54132164A (en) | 1978-04-05 | 1978-04-05 | Device for fabricating semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4012578A JPS54132164A (en) | 1978-04-05 | 1978-04-05 | Device for fabricating semiconductor |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12105382A Division JPS5825244A (en) | 1982-07-12 | 1982-07-12 | Manufacturing device for semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54132164A true JPS54132164A (en) | 1979-10-13 |
JPS5758771B2 JPS5758771B2 (en) | 1982-12-11 |
Family
ID=12572090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4012578A Granted JPS54132164A (en) | 1978-04-05 | 1978-04-05 | Device for fabricating semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54132164A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6296349A (en) * | 1985-10-22 | 1987-05-02 | Toshiba Ceramics Co Ltd | Quartz glass reaction tube for heat-treatment of semiconductor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62294763A (en) * | 1986-06-13 | 1987-12-22 | Tokyo Gasket Kogyo Kk | Seal gasket for injection nozzle |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5352368A (en) * | 1976-10-25 | 1978-05-12 | Hitachi Ltd | Quartz tube for furnace |
JPS5490968A (en) * | 1977-12-27 | 1979-07-19 | Toshiba Ceramics Co | Semiconductor diffusion furnace reactive tube |
-
1978
- 1978-04-05 JP JP4012578A patent/JPS54132164A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5352368A (en) * | 1976-10-25 | 1978-05-12 | Hitachi Ltd | Quartz tube for furnace |
JPS5490968A (en) * | 1977-12-27 | 1979-07-19 | Toshiba Ceramics Co | Semiconductor diffusion furnace reactive tube |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6296349A (en) * | 1985-10-22 | 1987-05-02 | Toshiba Ceramics Co Ltd | Quartz glass reaction tube for heat-treatment of semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS5758771B2 (en) | 1982-12-11 |
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