JPS5758771B2 - - Google Patents
Info
- Publication number
- JPS5758771B2 JPS5758771B2 JP53040125A JP4012578A JPS5758771B2 JP S5758771 B2 JPS5758771 B2 JP S5758771B2 JP 53040125 A JP53040125 A JP 53040125A JP 4012578 A JP4012578 A JP 4012578A JP S5758771 B2 JPS5758771 B2 JP S5758771B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4012578A JPS54132164A (en) | 1978-04-05 | 1978-04-05 | Device for fabricating semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4012578A JPS54132164A (en) | 1978-04-05 | 1978-04-05 | Device for fabricating semiconductor |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57121053A Division JPS5825244A (ja) | 1982-07-12 | 1982-07-12 | 半導体製造用装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54132164A JPS54132164A (en) | 1979-10-13 |
| JPS5758771B2 true JPS5758771B2 (OSRAM) | 1982-12-11 |
Family
ID=12572090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4012578A Granted JPS54132164A (en) | 1978-04-05 | 1978-04-05 | Device for fabricating semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54132164A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62294763A (ja) * | 1986-06-13 | 1987-12-22 | Tokyo Gasket Kogyo Kk | インジエクシヨン・ノズル用シ−ルガスケツト |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6296349A (ja) * | 1985-10-22 | 1987-05-02 | Toshiba Ceramics Co Ltd | 半導体熱処理用石英ガラス反応管 |
| DE102019218727A1 (de) * | 2019-12-03 | 2021-06-10 | Robert Bosch Gmbh | Vorrichtung und verfahren zum bearbeiten mindestens eines halbleiter-substrates |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5352368A (en) * | 1976-10-25 | 1978-05-12 | Hitachi Ltd | Quartz tube for furnace |
| JPS5490968A (en) * | 1977-12-27 | 1979-07-19 | Toshiba Ceramics Co | Semiconductor diffusion furnace reactive tube |
-
1978
- 1978-04-05 JP JP4012578A patent/JPS54132164A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62294763A (ja) * | 1986-06-13 | 1987-12-22 | Tokyo Gasket Kogyo Kk | インジエクシヨン・ノズル用シ−ルガスケツト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54132164A (en) | 1979-10-13 |