JPS54128386A - Measuring apparatus for degree of vacuum - Google Patents

Measuring apparatus for degree of vacuum

Info

Publication number
JPS54128386A
JPS54128386A JP3583178A JP3583178A JPS54128386A JP S54128386 A JPS54128386 A JP S54128386A JP 3583178 A JP3583178 A JP 3583178A JP 3583178 A JP3583178 A JP 3583178A JP S54128386 A JPS54128386 A JP S54128386A
Authority
JP
Japan
Prior art keywords
circuit
voltage
current
discharge
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3583178A
Other languages
Japanese (ja)
Inventor
Katsuhiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3583178A priority Critical patent/JPS54128386A/en
Publication of JPS54128386A publication Critical patent/JPS54128386A/en
Pending legal-status Critical Current

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Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To discharge stably and measure the degree of vacuum correctly, by furnishing the discharge type vacuum measuring apparatus with current-voltage converting circuit, voltage holding circuit, integrating circuit, and display control circuit.
CONSTITUTION: A control circuit 1 possessing a clock circuit controls the output time of discharge power source 2 to generate high voltage pulses, and the operation of an ingegrating circuit 3a to integrate the time of the outputs of current-voltage converting circuit 3b and voltage holding circuit 3c to hold the output voltage of the current-voltage converting circuit 3b. This current- voltage converting circuit 3b outputs the voltage proportional to the low frequency component of the discharge current, and the integrating circuit 3a detects abnormality in the discharge generation. A display control circuit 10 possesses a switching circuit and a comparator circuit, and an amplifier and compares the outputs of the voltage hold circuit 3c and the integrating circuit 3a through the amplifier, and controls the display circuit 9 by the switching action. The display circuit 9 possesses a voltage self-holding circuit, and displays the degree of vacuum. The abnormality display device 11 displays the state of an abnormality and also controls the control circuit 1.
COPYRIGHT: (C)1979,JPO&Japio
JP3583178A 1978-03-28 1978-03-28 Measuring apparatus for degree of vacuum Pending JPS54128386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3583178A JPS54128386A (en) 1978-03-28 1978-03-28 Measuring apparatus for degree of vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3583178A JPS54128386A (en) 1978-03-28 1978-03-28 Measuring apparatus for degree of vacuum

Publications (1)

Publication Number Publication Date
JPS54128386A true JPS54128386A (en) 1979-10-04

Family

ID=12452896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3583178A Pending JPS54128386A (en) 1978-03-28 1978-03-28 Measuring apparatus for degree of vacuum

Country Status (1)

Country Link
JP (1) JPS54128386A (en)

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