JPS54128282A - Method of forming high resolution pattern - Google Patents

Method of forming high resolution pattern

Info

Publication number
JPS54128282A
JPS54128282A JP3543478A JP3543478A JPS54128282A JP S54128282 A JPS54128282 A JP S54128282A JP 3543478 A JP3543478 A JP 3543478A JP 3543478 A JP3543478 A JP 3543478A JP S54128282 A JPS54128282 A JP S54128282A
Authority
JP
Japan
Prior art keywords
high resolution
forming high
resolution pattern
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3543478A
Other languages
Japanese (ja)
Inventor
Kiyouji Saeki
Iwao Hara
Hirokazu Matsunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Noritake Co Ltd
Original Assignee
Nippon Toki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Toki Co Ltd filed Critical Nippon Toki Co Ltd
Priority to JP3543478A priority Critical patent/JPS54128282A/en
Publication of JPS54128282A publication Critical patent/JPS54128282A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3543478A 1978-03-29 1978-03-29 Method of forming high resolution pattern Pending JPS54128282A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3543478A JPS54128282A (en) 1978-03-29 1978-03-29 Method of forming high resolution pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3543478A JPS54128282A (en) 1978-03-29 1978-03-29 Method of forming high resolution pattern

Publications (1)

Publication Number Publication Date
JPS54128282A true JPS54128282A (en) 1979-10-04

Family

ID=12441740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3543478A Pending JPS54128282A (en) 1978-03-29 1978-03-29 Method of forming high resolution pattern

Country Status (1)

Country Link
JP (1) JPS54128282A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4993861A (en) * 1973-01-10 1974-09-06
JPS52131158A (en) * 1976-04-26 1977-11-02 Nippon Electric Co Electronic circuit substrate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4993861A (en) * 1973-01-10 1974-09-06
JPS52131158A (en) * 1976-04-26 1977-11-02 Nippon Electric Co Electronic circuit substrate

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