JPS54128282A - Method of forming high resolution pattern - Google Patents
Method of forming high resolution patternInfo
- Publication number
- JPS54128282A JPS54128282A JP3543478A JP3543478A JPS54128282A JP S54128282 A JPS54128282 A JP S54128282A JP 3543478 A JP3543478 A JP 3543478A JP 3543478 A JP3543478 A JP 3543478A JP S54128282 A JPS54128282 A JP S54128282A
- Authority
- JP
- Japan
- Prior art keywords
- high resolution
- forming high
- resolution pattern
- pattern
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3543478A JPS54128282A (en) | 1978-03-29 | 1978-03-29 | Method of forming high resolution pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3543478A JPS54128282A (en) | 1978-03-29 | 1978-03-29 | Method of forming high resolution pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54128282A true JPS54128282A (en) | 1979-10-04 |
Family
ID=12441740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3543478A Pending JPS54128282A (en) | 1978-03-29 | 1978-03-29 | Method of forming high resolution pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54128282A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4993861A (en) * | 1973-01-10 | 1974-09-06 | ||
JPS52131158A (en) * | 1976-04-26 | 1977-11-02 | Nippon Electric Co | Electronic circuit substrate |
-
1978
- 1978-03-29 JP JP3543478A patent/JPS54128282A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4993861A (en) * | 1973-01-10 | 1974-09-06 | ||
JPS52131158A (en) * | 1976-04-26 | 1977-11-02 | Nippon Electric Co | Electronic circuit substrate |
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