JPS5678192A - Method of forming extrefine resist pattern - Google Patents

Method of forming extrefine resist pattern

Info

Publication number
JPS5678192A
JPS5678192A JP15441279A JP15441279A JPS5678192A JP S5678192 A JPS5678192 A JP S5678192A JP 15441279 A JP15441279 A JP 15441279A JP 15441279 A JP15441279 A JP 15441279A JP S5678192 A JPS5678192 A JP S5678192A
Authority
JP
Japan
Prior art keywords
extrefine
forming
resist pattern
resist
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15441279A
Other languages
Japanese (ja)
Other versions
JPS5756228B2 (en
Inventor
Yoshiyuki Tsujita
Hiroaki Okudaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15441279A priority Critical patent/JPS5678192A/en
Publication of JPS5678192A publication Critical patent/JPS5678192A/en
Publication of JPS5756228B2 publication Critical patent/JPS5756228B2/ja
Granted legal-status Critical Current

Links

JP15441279A 1979-11-30 1979-11-30 Method of forming extrefine resist pattern Granted JPS5678192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15441279A JPS5678192A (en) 1979-11-30 1979-11-30 Method of forming extrefine resist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15441279A JPS5678192A (en) 1979-11-30 1979-11-30 Method of forming extrefine resist pattern

Publications (2)

Publication Number Publication Date
JPS5678192A true JPS5678192A (en) 1981-06-26
JPS5756228B2 JPS5756228B2 (en) 1982-11-29

Family

ID=15583580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15441279A Granted JPS5678192A (en) 1979-11-30 1979-11-30 Method of forming extrefine resist pattern

Country Status (1)

Country Link
JP (1) JPS5678192A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817696A (en) * 1981-07-23 1983-02-01 日立化成工業株式会社 Method of producing multilayer printed circuit board
JPS5818633A (en) * 1981-07-27 1983-02-03 Toray Ind Inc Method for preventing stickiness of surface of saponified polyvinyl acetate type photosensitive resin layer
JPS61133940A (en) * 1984-12-05 1986-06-21 Sumitomo Bakelite Co Ltd Preparation of plate for printed circuit
JPH07105650A (en) * 1993-09-14 1995-04-21 Tdk Corp Manufacture of magnetic head and resist film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817696A (en) * 1981-07-23 1983-02-01 日立化成工業株式会社 Method of producing multilayer printed circuit board
JPS5818633A (en) * 1981-07-27 1983-02-03 Toray Ind Inc Method for preventing stickiness of surface of saponified polyvinyl acetate type photosensitive resin layer
JPS61133940A (en) * 1984-12-05 1986-06-21 Sumitomo Bakelite Co Ltd Preparation of plate for printed circuit
JPH07105650A (en) * 1993-09-14 1995-04-21 Tdk Corp Manufacture of magnetic head and resist film

Also Published As

Publication number Publication date
JPS5756228B2 (en) 1982-11-29

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