JPS5678192A - Method of forming extrefine resist pattern - Google Patents
Method of forming extrefine resist patternInfo
- Publication number
- JPS5678192A JPS5678192A JP15441279A JP15441279A JPS5678192A JP S5678192 A JPS5678192 A JP S5678192A JP 15441279 A JP15441279 A JP 15441279A JP 15441279 A JP15441279 A JP 15441279A JP S5678192 A JPS5678192 A JP S5678192A
- Authority
- JP
- Japan
- Prior art keywords
- extrefine
- forming
- resist pattern
- resist
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15441279A JPS5678192A (en) | 1979-11-30 | 1979-11-30 | Method of forming extrefine resist pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15441279A JPS5678192A (en) | 1979-11-30 | 1979-11-30 | Method of forming extrefine resist pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5678192A true JPS5678192A (en) | 1981-06-26 |
JPS5756228B2 JPS5756228B2 (en) | 1982-11-29 |
Family
ID=15583580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15441279A Granted JPS5678192A (en) | 1979-11-30 | 1979-11-30 | Method of forming extrefine resist pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5678192A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5817696A (en) * | 1981-07-23 | 1983-02-01 | 日立化成工業株式会社 | Method of producing multilayer printed circuit board |
JPS5818633A (en) * | 1981-07-27 | 1983-02-03 | Toray Ind Inc | Method for preventing stickiness of surface of saponified polyvinyl acetate type photosensitive resin layer |
JPS61133940A (en) * | 1984-12-05 | 1986-06-21 | Sumitomo Bakelite Co Ltd | Preparation of plate for printed circuit |
JPH07105650A (en) * | 1993-09-14 | 1995-04-21 | Tdk Corp | Manufacture of magnetic head and resist film |
-
1979
- 1979-11-30 JP JP15441279A patent/JPS5678192A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5817696A (en) * | 1981-07-23 | 1983-02-01 | 日立化成工業株式会社 | Method of producing multilayer printed circuit board |
JPS5818633A (en) * | 1981-07-27 | 1983-02-03 | Toray Ind Inc | Method for preventing stickiness of surface of saponified polyvinyl acetate type photosensitive resin layer |
JPS61133940A (en) * | 1984-12-05 | 1986-06-21 | Sumitomo Bakelite Co Ltd | Preparation of plate for printed circuit |
JPH07105650A (en) * | 1993-09-14 | 1995-04-21 | Tdk Corp | Manufacture of magnetic head and resist film |
Also Published As
Publication number | Publication date |
---|---|
JPS5756228B2 (en) | 1982-11-29 |
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