JPS54127940A - Coating blade - Google Patents

Coating blade

Info

Publication number
JPS54127940A
JPS54127940A JP3645878A JP3645878A JPS54127940A JP S54127940 A JPS54127940 A JP S54127940A JP 3645878 A JP3645878 A JP 3645878A JP 3645878 A JP3645878 A JP 3645878A JP S54127940 A JPS54127940 A JP S54127940A
Authority
JP
Japan
Prior art keywords
well
coating blade
width
coating
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3645878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218222B2 (cs
Inventor
Kiyohide Muramatsu
Akio Yagishita
Kyohei Murakawa
Hirofumi Okuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3645878A priority Critical patent/JPS54127940A/ja
Publication of JPS54127940A publication Critical patent/JPS54127940A/ja
Publication of JPS6218222B2 publication Critical patent/JPS6218222B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3645878A 1978-03-29 1978-03-29 Coating blade Granted JPS54127940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3645878A JPS54127940A (en) 1978-03-29 1978-03-29 Coating blade

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3645878A JPS54127940A (en) 1978-03-29 1978-03-29 Coating blade

Publications (2)

Publication Number Publication Date
JPS54127940A true JPS54127940A (en) 1979-10-04
JPS6218222B2 JPS6218222B2 (cs) 1987-04-22

Family

ID=12470368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3645878A Granted JPS54127940A (en) 1978-03-29 1978-03-29 Coating blade

Country Status (1)

Country Link
JP (1) JPS54127940A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59500459A (ja) * 1982-02-24 1984-03-22 ボツク，エドワ−ド 基板上にコ−ティングを付与する方法及び装置
CN105880050A (zh) * 2015-02-18 2016-08-24 朗姆研究公司Ag 狭缝喷嘴
CN105921360A (zh) * 2016-07-01 2016-09-07 深圳市华星光电技术有限公司 狭缝喷嘴和涂布装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959838A (cs) * 1972-08-03 1974-06-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959838A (cs) * 1972-08-03 1974-06-11

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59500459A (ja) * 1982-02-24 1984-03-22 ボツク，エドワ−ド 基板上にコ−ティングを付与する方法及び装置
CN105880050A (zh) * 2015-02-18 2016-08-24 朗姆研究公司Ag 狭缝喷嘴
CN105880050B (zh) * 2015-02-18 2018-07-20 朗姆研究公司Ag 狭缝喷嘴
CN105921360A (zh) * 2016-07-01 2016-09-07 深圳市华星光电技术有限公司 狭缝喷嘴和涂布装置
CN105921360B (zh) * 2016-07-01 2019-02-12 深圳市华星光电技术有限公司 狭缝喷嘴和涂布装置

Also Published As

Publication number Publication date
JPS6218222B2 (cs) 1987-04-22

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