JPS5310976A - Thin film forming apparatus - Google Patents

Thin film forming apparatus

Info

Publication number
JPS5310976A
JPS5310976A JP8509376A JP8509376A JPS5310976A JP S5310976 A JPS5310976 A JP S5310976A JP 8509376 A JP8509376 A JP 8509376A JP 8509376 A JP8509376 A JP 8509376A JP S5310976 A JPS5310976 A JP S5310976A
Authority
JP
Japan
Prior art keywords
thin film
forming apparatus
film forming
finest
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8509376A
Other languages
Japanese (ja)
Inventor
Hideo Matsuzaki
Shizuo Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8509376A priority Critical patent/JPS5310976A/en
Publication of JPS5310976A publication Critical patent/JPS5310976A/en
Pending legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: To form a uniform thin film by setting the temperature, gas flow condition and velocity of flow of a dry atmosphere at the finest conditions.
COPYRIGHT: (C)1978,JPO&Japio
JP8509376A 1976-07-19 1976-07-19 Thin film forming apparatus Pending JPS5310976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8509376A JPS5310976A (en) 1976-07-19 1976-07-19 Thin film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8509376A JPS5310976A (en) 1976-07-19 1976-07-19 Thin film forming apparatus

Publications (1)

Publication Number Publication Date
JPS5310976A true JPS5310976A (en) 1978-01-31

Family

ID=13848980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8509376A Pending JPS5310976A (en) 1976-07-19 1976-07-19 Thin film forming apparatus

Country Status (1)

Country Link
JP (1) JPS5310976A (en)

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