JPS54124780A - Surface inspection apparatus - Google Patents

Surface inspection apparatus

Info

Publication number
JPS54124780A
JPS54124780A JP3104178A JP3104178A JPS54124780A JP S54124780 A JPS54124780 A JP S54124780A JP 3104178 A JP3104178 A JP 3104178A JP 3104178 A JP3104178 A JP 3104178A JP S54124780 A JPS54124780 A JP S54124780A
Authority
JP
Japan
Prior art keywords
defect
light
examined
photo detector
optical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3104178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151257B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masayoshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3104178A priority Critical patent/JPS54124780A/ja
Publication of JPS54124780A publication Critical patent/JPS54124780A/ja
Publication of JPS6151257B2 publication Critical patent/JPS6151257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3104178A 1978-03-20 1978-03-20 Surface inspection apparatus Granted JPS54124780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3104178A JPS54124780A (en) 1978-03-20 1978-03-20 Surface inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3104178A JPS54124780A (en) 1978-03-20 1978-03-20 Surface inspection apparatus

Publications (2)

Publication Number Publication Date
JPS54124780A true JPS54124780A (en) 1979-09-27
JPS6151257B2 JPS6151257B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-07

Family

ID=12320391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3104178A Granted JPS54124780A (en) 1978-03-20 1978-03-20 Surface inspection apparatus

Country Status (1)

Country Link
JP (1) JPS54124780A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012154686A (ja) * 2011-01-24 2012-08-16 Fujitsu Ltd 傷検査装置、傷検査システム、及び傷検査方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394075U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-12-05 1988-06-17
JPS6435163U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-08-28 1989-03-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012154686A (ja) * 2011-01-24 2012-08-16 Fujitsu Ltd 傷検査装置、傷検査システム、及び傷検査方法

Also Published As

Publication number Publication date
JPS6151257B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-07

Similar Documents

Publication Publication Date Title
JPS6435246A (en) Apparatus and method for measuring nature of surface
NZ228526A (en) Measuring curvature of transparent tube by reflection/refraction of incident light
SE7514389L (sv) Forfarande for opto-elektronisk positionsavkenning och inspektion samt for utforande av forfarandet avsedd anordning
JPS57131039A (en) Defect detector
ES8500445A1 (es) Procedimiento y aparato para la deteccion optica de defectos radiales reflectantes en recipientes traslucidos
EP0396409A3 (en) High resolution ellipsometric apparatus
JPS5483854A (en) Measuring device
US3405270A (en) Internal flaw detection using collimated beams
JPS54128682A (en) Automatic detector for foreign matters
JPS54101390A (en) Foreign matter inspector
EP0116746A3 (en) Apparatus and method for measuring refractive index of liquids
JPS54124780A (en) Surface inspection apparatus
JPS5483853A (en) Measuring device
JPS5690246A (en) Optical defect detection device
ES372098A1 (es) Un procedimiento para detectar defectos en material en la- mina de vidrio.
JPS5667739A (en) Defect inspecting apparatus
JPS5599049A (en) Defect detector
KR100241028B1 (ko) 레이저를 이용한 내부결함 검출방법 및 그 장치
JPS6453138A (en) Surface inspecting device for semiconductor wafer
GB1441386A (en) Scanning apparatus
JPS6418071A (en) Detecting apparatus for voltage
JPS5759153A (en) Detector for surface characteristic
JPS55140102A (en) Measuring device for flatness of inspected plane glass
JPS57190246A (en) Detector for lens defect
JPS57182604A (en) Interference measuring device