JPS54112174A - Testing method for semiconductor device - Google Patents

Testing method for semiconductor device

Info

Publication number
JPS54112174A
JPS54112174A JP2008378A JP2008378A JPS54112174A JP S54112174 A JPS54112174 A JP S54112174A JP 2008378 A JP2008378 A JP 2008378A JP 2008378 A JP2008378 A JP 2008378A JP S54112174 A JPS54112174 A JP S54112174A
Authority
JP
Japan
Prior art keywords
probe
stage
contact
prober
serve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6252457B2 (enrdf_load_stackoverflow
Inventor
Michio Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2008378A priority Critical patent/JPS54112174A/ja
Publication of JPS54112174A publication Critical patent/JPS54112174A/ja
Publication of JPS6252457B2 publication Critical patent/JPS6252457B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2008378A 1978-02-22 1978-02-22 Testing method for semiconductor device Granted JPS54112174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008378A JPS54112174A (en) 1978-02-22 1978-02-22 Testing method for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008378A JPS54112174A (en) 1978-02-22 1978-02-22 Testing method for semiconductor device

Publications (2)

Publication Number Publication Date
JPS54112174A true JPS54112174A (en) 1979-09-01
JPS6252457B2 JPS6252457B2 (enrdf_load_stackoverflow) 1987-11-05

Family

ID=12017197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008378A Granted JPS54112174A (en) 1978-02-22 1978-02-22 Testing method for semiconductor device

Country Status (1)

Country Link
JP (1) JPS54112174A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635738A (en) * 1979-08-31 1981-04-08 Kubota Ltd High-nickel high-hardness corrosion resistant alloy for electrically conductive roll
JPS57186037U (enrdf_load_stackoverflow) * 1981-05-20 1982-11-26
JPS5935442A (ja) * 1982-08-24 1984-02-27 Nec Kyushu Ltd 信号方式
JPS6239022A (ja) * 1985-08-14 1987-02-20 Toshiba Corp プロ−ブテスト方法
US4751458A (en) * 1984-04-02 1988-06-14 American Telephone And Telegraph Company, At&T Bell Laboratories Test pads for integrated circuit chips

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635738A (en) * 1979-08-31 1981-04-08 Kubota Ltd High-nickel high-hardness corrosion resistant alloy for electrically conductive roll
JPS57186037U (enrdf_load_stackoverflow) * 1981-05-20 1982-11-26
JPS5935442A (ja) * 1982-08-24 1984-02-27 Nec Kyushu Ltd 信号方式
US4751458A (en) * 1984-04-02 1988-06-14 American Telephone And Telegraph Company, At&T Bell Laboratories Test pads for integrated circuit chips
JPS6239022A (ja) * 1985-08-14 1987-02-20 Toshiba Corp プロ−ブテスト方法

Also Published As

Publication number Publication date
JPS6252457B2 (enrdf_load_stackoverflow) 1987-11-05

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