JPS5390874A - Printer device - Google Patents

Printer device

Info

Publication number
JPS5390874A
JPS5390874A JP550577A JP550577A JPS5390874A JP S5390874 A JPS5390874 A JP S5390874A JP 550577 A JP550577 A JP 550577A JP 550577 A JP550577 A JP 550577A JP S5390874 A JPS5390874 A JP S5390874A
Authority
JP
Japan
Prior art keywords
printer device
area
sensitizer
shorten
giving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP550577A
Other languages
Japanese (ja)
Other versions
JPS5949686B2 (en
Inventor
Akiyoshi Suzuki
Hideki Yoshinari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP52005505A priority Critical patent/JPS5949686B2/en
Publication of JPS5390874A publication Critical patent/JPS5390874A/en
Publication of JPS5949686B2 publication Critical patent/JPS5949686B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To shorten the printing time by providing the light volume control material directly or indirectly to the mask and giving a larger scale exposure to the alignment mark area on the wafer applied with the sensitizer than the area where the element is printed.
COPYRIGHT: (C)1978,JPO&Japio
JP52005505A 1977-01-21 1977-01-21 Baking equipment Expired JPS5949686B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52005505A JPS5949686B2 (en) 1977-01-21 1977-01-21 Baking equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52005505A JPS5949686B2 (en) 1977-01-21 1977-01-21 Baking equipment

Publications (2)

Publication Number Publication Date
JPS5390874A true JPS5390874A (en) 1978-08-10
JPS5949686B2 JPS5949686B2 (en) 1984-12-04

Family

ID=11613050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52005505A Expired JPS5949686B2 (en) 1977-01-21 1977-01-21 Baking equipment

Country Status (1)

Country Link
JP (1) JPS5949686B2 (en)

Also Published As

Publication number Publication date
JPS5949686B2 (en) 1984-12-04

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