JPS5390874A - Printer device - Google Patents
Printer deviceInfo
- Publication number
- JPS5390874A JPS5390874A JP550577A JP550577A JPS5390874A JP S5390874 A JPS5390874 A JP S5390874A JP 550577 A JP550577 A JP 550577A JP 550577 A JP550577 A JP 550577A JP S5390874 A JPS5390874 A JP S5390874A
- Authority
- JP
- Japan
- Prior art keywords
- printer device
- area
- sensitizer
- shorten
- giving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To shorten the printing time by providing the light volume control material directly or indirectly to the mask and giving a larger scale exposure to the alignment mark area on the wafer applied with the sensitizer than the area where the element is printed.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52005505A JPS5949686B2 (en) | 1977-01-21 | 1977-01-21 | Baking equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52005505A JPS5949686B2 (en) | 1977-01-21 | 1977-01-21 | Baking equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5390874A true JPS5390874A (en) | 1978-08-10 |
JPS5949686B2 JPS5949686B2 (en) | 1984-12-04 |
Family
ID=11613050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52005505A Expired JPS5949686B2 (en) | 1977-01-21 | 1977-01-21 | Baking equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5949686B2 (en) |
-
1977
- 1977-01-21 JP JP52005505A patent/JPS5949686B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5949686B2 (en) | 1984-12-04 |
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