JPS5379594A - Surface inspecting apparatus of objects - Google Patents

Surface inspecting apparatus of objects

Info

Publication number
JPS5379594A
JPS5379594A JP15488476A JP15488476A JPS5379594A JP S5379594 A JPS5379594 A JP S5379594A JP 15488476 A JP15488476 A JP 15488476A JP 15488476 A JP15488476 A JP 15488476A JP S5379594 A JPS5379594 A JP S5379594A
Authority
JP
Japan
Prior art keywords
objects
inspecting apparatus
surface inspecting
determing
drift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15488476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5725780B2 (enrdf_load_stackoverflow
Inventor
Yasuo Nakagawa
Hiroshi Makihira
Toshimitsu Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15488476A priority Critical patent/JPS5379594A/ja
Priority to US05/863,345 priority patent/US4226539A/en
Publication of JPS5379594A publication Critical patent/JPS5379594A/ja
Publication of JPS5725780B2 publication Critical patent/JPS5725780B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15488476A 1976-12-24 1976-12-24 Surface inspecting apparatus of objects Granted JPS5379594A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15488476A JPS5379594A (en) 1976-12-24 1976-12-24 Surface inspecting apparatus of objects
US05/863,345 US4226539A (en) 1976-12-24 1977-12-22 Cylindrical body appearance inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15488476A JPS5379594A (en) 1976-12-24 1976-12-24 Surface inspecting apparatus of objects

Publications (2)

Publication Number Publication Date
JPS5379594A true JPS5379594A (en) 1978-07-14
JPS5725780B2 JPS5725780B2 (enrdf_load_stackoverflow) 1982-06-01

Family

ID=15594049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15488476A Granted JPS5379594A (en) 1976-12-24 1976-12-24 Surface inspecting apparatus of objects

Country Status (1)

Country Link
JP (1) JPS5379594A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583840A (en) * 1978-12-18 1980-06-24 Gretag Ag Quality assessment method of printed matter
JPS55154442A (en) * 1979-05-21 1980-12-02 Hitachi Ltd Inspecting apparatus
JPS5746853U (enrdf_load_stackoverflow) * 1980-08-30 1982-03-16
JPS5863614U (ja) * 1981-10-20 1983-04-28 コニカ株式会社 表面検査装置の照明制御装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132822A (ja) * 1983-12-16 1985-07-15 Daiwa Denki Kogyo Kk パ−ツフイ−ダ及び受光フアイバ−固着方法
JPS6218605U (enrdf_load_stackoverflow) * 1985-07-17 1987-02-04

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583840A (en) * 1978-12-18 1980-06-24 Gretag Ag Quality assessment method of printed matter
JPS55154442A (en) * 1979-05-21 1980-12-02 Hitachi Ltd Inspecting apparatus
JPS5746853U (enrdf_load_stackoverflow) * 1980-08-30 1982-03-16
JPS5863614U (ja) * 1981-10-20 1983-04-28 コニカ株式会社 表面検査装置の照明制御装置

Also Published As

Publication number Publication date
JPS5725780B2 (enrdf_load_stackoverflow) 1982-06-01

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