JPS5379386A - Etching method - Google Patents

Etching method

Info

Publication number
JPS5379386A
JPS5379386A JP15503476A JP15503476A JPS5379386A JP S5379386 A JPS5379386 A JP S5379386A JP 15503476 A JP15503476 A JP 15503476A JP 15503476 A JP15503476 A JP 15503476A JP S5379386 A JPS5379386 A JP S5379386A
Authority
JP
Japan
Prior art keywords
work
etching method
exposing
freedom
degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15503476A
Other languages
Japanese (ja)
Inventor
Kiyokatsu Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15503476A priority Critical patent/JPS5379386A/en
Publication of JPS5379386A publication Critical patent/JPS5379386A/en
Pending legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To increase the degree of freedom of etching process by providing an organic compound film having double bonds partially on the work and exposing the work and exposing the work to a reactive gas thereby making selective etching.
COPYRIGHT: (C)1978,JPO&Japio
JP15503476A 1976-12-24 1976-12-24 Etching method Pending JPS5379386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15503476A JPS5379386A (en) 1976-12-24 1976-12-24 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15503476A JPS5379386A (en) 1976-12-24 1976-12-24 Etching method

Publications (1)

Publication Number Publication Date
JPS5379386A true JPS5379386A (en) 1978-07-13

Family

ID=15597217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15503476A Pending JPS5379386A (en) 1976-12-24 1976-12-24 Etching method

Country Status (1)

Country Link
JP (1) JPS5379386A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03278431A (en) * 1989-05-09 1991-12-10 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03278431A (en) * 1989-05-09 1991-12-10 Fujitsu Ltd Manufacture of semiconductor device

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