JPS5378186A - Forming method of film conductor - Google Patents
Forming method of film conductorInfo
- Publication number
- JPS5378186A JPS5378186A JP15469676A JP15469676A JPS5378186A JP S5378186 A JPS5378186 A JP S5378186A JP 15469676 A JP15469676 A JP 15469676A JP 15469676 A JP15469676 A JP 15469676A JP S5378186 A JPS5378186 A JP S5378186A
- Authority
- JP
- Japan
- Prior art keywords
- film conductor
- electrode
- forming method
- substrate
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: The substrate to which a thin film conductor is adhered is mounted on the 2nd substrate, and the 3rd electrode is arranged between the 2nd electrode and the 1st electrode of the metal for the thin film conductor to be generated on it; and the voltage is applied to the 3rd electrode to absorb the electrons generated through the ionization, so that the airtightness will be improved by suppressing the temperature rise of the substrate in sputtering.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15469676A JPS5378186A (en) | 1976-12-22 | 1976-12-22 | Forming method of film conductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15469676A JPS5378186A (en) | 1976-12-22 | 1976-12-22 | Forming method of film conductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5378186A true JPS5378186A (en) | 1978-07-11 |
Family
ID=15589935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15469676A Pending JPS5378186A (en) | 1976-12-22 | 1976-12-22 | Forming method of film conductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5378186A (en) |
-
1976
- 1976-12-22 JP JP15469676A patent/JPS5378186A/en active Pending
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