JPS5376175A - Substrate fixing jig for liquid phase epitaxial growth - Google Patents

Substrate fixing jig for liquid phase epitaxial growth

Info

Publication number
JPS5376175A
JPS5376175A JP15146176A JP15146176A JPS5376175A JP S5376175 A JPS5376175 A JP S5376175A JP 15146176 A JP15146176 A JP 15146176A JP 15146176 A JP15146176 A JP 15146176A JP S5376175 A JPS5376175 A JP S5376175A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
fixing jig
substrate fixing
phase epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15146176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5413430B2 (Direct
Inventor
Keikichi Ando
Norio Oota
Fumihiko Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP15146176A priority Critical patent/JPS5376175A/ja
Publication of JPS5376175A publication Critical patent/JPS5376175A/ja
Publication of JPS5413430B2 publication Critical patent/JPS5413430B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Thin Magnetic Films (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15146176A 1976-12-18 1976-12-18 Substrate fixing jig for liquid phase epitaxial growth Granted JPS5376175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15146176A JPS5376175A (en) 1976-12-18 1976-12-18 Substrate fixing jig for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15146176A JPS5376175A (en) 1976-12-18 1976-12-18 Substrate fixing jig for liquid phase epitaxial growth

Publications (2)

Publication Number Publication Date
JPS5376175A true JPS5376175A (en) 1978-07-06
JPS5413430B2 JPS5413430B2 (Direct) 1979-05-30

Family

ID=15519043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15146176A Granted JPS5376175A (en) 1976-12-18 1976-12-18 Substrate fixing jig for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5376175A (Direct)

Also Published As

Publication number Publication date
JPS5413430B2 (Direct) 1979-05-30

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