JPS5371565A - Reticule washing equipment - Google Patents
Reticule washing equipmentInfo
- Publication number
- JPS5371565A JPS5371565A JP14652176A JP14652176A JPS5371565A JP S5371565 A JPS5371565 A JP S5371565A JP 14652176 A JP14652176 A JP 14652176A JP 14652176 A JP14652176 A JP 14652176A JP S5371565 A JPS5371565 A JP S5371565A
- Authority
- JP
- Japan
- Prior art keywords
- reticule
- washing equipment
- couple
- wash
- short time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14652176A JPS5371565A (en) | 1976-12-08 | 1976-12-08 | Reticule washing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14652176A JPS5371565A (en) | 1976-12-08 | 1976-12-08 | Reticule washing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5371565A true JPS5371565A (en) | 1978-06-26 |
Family
ID=15409522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14652176A Pending JPS5371565A (en) | 1976-12-08 | 1976-12-08 | Reticule washing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5371565A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55173136U (ja) * | 1979-05-28 | 1980-12-12 | ||
JPS5632728A (en) * | 1979-08-27 | 1981-04-02 | Fujitsu Ltd | Mask washing apparatus |
JPS5790941A (en) * | 1980-11-27 | 1982-06-05 | Toshiba Corp | Swing type vertical washer |
JPS60106137A (ja) * | 1983-11-14 | 1985-06-11 | Mitsubishi Electric Corp | 半導体ウエ−ハの表面異物除去装置 |
-
1976
- 1976-12-08 JP JP14652176A patent/JPS5371565A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55173136U (ja) * | 1979-05-28 | 1980-12-12 | ||
JPS598352Y2 (ja) * | 1979-05-28 | 1984-03-15 | 富士通株式会社 | ガラスマスクの洗浄装置 |
JPS5632728A (en) * | 1979-08-27 | 1981-04-02 | Fujitsu Ltd | Mask washing apparatus |
JPS6313336B2 (ja) * | 1979-08-27 | 1988-03-25 | Fujitsu Ltd | |
JPS5790941A (en) * | 1980-11-27 | 1982-06-05 | Toshiba Corp | Swing type vertical washer |
JPS60106137A (ja) * | 1983-11-14 | 1985-06-11 | Mitsubishi Electric Corp | 半導体ウエ−ハの表面異物除去装置 |
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