JPS55173136U - - Google Patents

Info

Publication number
JPS55173136U
JPS55173136U JP1979071625U JP7162579U JPS55173136U JP S55173136 U JPS55173136 U JP S55173136U JP 1979071625 U JP1979071625 U JP 1979071625U JP 7162579 U JP7162579 U JP 7162579U JP S55173136 U JPS55173136 U JP S55173136U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1979071625U
Other versions
JPS598352Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979071625U priority Critical patent/JPS598352Y2/ja
Priority to EP80301689A priority patent/EP0020088B1/en
Priority to DE8080301689T priority patent/DE3067323D1/de
Publication of JPS55173136U publication Critical patent/JPS55173136U/ja
Priority to US06/406,856 priority patent/US4570279A/en
Application granted granted Critical
Publication of JPS598352Y2 publication Critical patent/JPS598352Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP1979071625U 1979-05-28 1979-05-28 ガラスマスクの洗浄装置 Expired JPS598352Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1979071625U JPS598352Y2 (ja) 1979-05-28 1979-05-28 ガラスマスクの洗浄装置
EP80301689A EP0020088B1 (en) 1979-05-28 1980-05-21 Apparatus for cleaning glass masks
DE8080301689T DE3067323D1 (en) 1979-05-28 1980-05-21 Apparatus for cleaning glass masks
US06/406,856 US4570279A (en) 1979-05-28 1983-10-03 Apparatus for cleaning glass masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979071625U JPS598352Y2 (ja) 1979-05-28 1979-05-28 ガラスマスクの洗浄装置

Publications (2)

Publication Number Publication Date
JPS55173136U true JPS55173136U (ja) 1980-12-12
JPS598352Y2 JPS598352Y2 (ja) 1984-03-15

Family

ID=13466016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979071625U Expired JPS598352Y2 (ja) 1979-05-28 1979-05-28 ガラスマスクの洗浄装置

Country Status (4)

Country Link
US (1) US4570279A (ja)
EP (1) EP0020088B1 (ja)
JP (1) JPS598352Y2 (ja)
DE (1) DE3067323D1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2645425B2 (ja) * 1985-03-04 1997-08-25 松下冷機株式会社 伝熱管壁面の製造方法
JPH0695508B2 (ja) * 1986-11-28 1994-11-24 大日本スクリ−ン製造株式会社 基板の両面洗浄装置
JP3347528B2 (ja) * 1995-05-23 2002-11-20 キヤノン株式会社 半導体製造装置
US5870792A (en) * 1997-03-31 1999-02-16 Speedfam Corporation Apparatus for cleaning wafers and discs
US6006391A (en) * 1997-11-10 1999-12-28 Speedfam-Ipec Corporation Workpiece cleaning element with improved rib configuration
US7127830B2 (en) * 2004-08-02 2006-10-31 Wafertech, Llc Reticle carrier apparatus and method that tilts reticle for drying
US8795466B2 (en) * 2008-06-14 2014-08-05 Intevac, Inc. System and method for processing substrates with detachable mask

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5184371U (ja) * 1974-12-26 1976-07-06
JPS5371565A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Reticule washing equipment

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3213472A (en) * 1959-08-14 1965-10-26 Metro Goldwyn Mayer Inc Surface cleaning apparatus
US3098249A (en) * 1961-10-23 1963-07-23 Smc Corp Scrubbing and drying machine for flexible sheets
FR2063961A1 (en) * 1969-10-13 1971-07-16 Radiotechnique Compelec Mechanico-chemical grinder for semi-con-ducting panels
US3874525A (en) * 1973-06-29 1975-04-01 Ibm Method and apparatus for handling workpieces
US3939514A (en) * 1974-11-11 1976-02-24 Kayex Corporation Apparatus for cleaning thin, fragile wafers of a material
US4062463A (en) * 1976-05-11 1977-12-13 Machine Technology, Inc. Automated single cassette load mechanism for scrubber
JPS5387904A (en) * 1977-01-13 1978-08-02 Mitsui Mining & Smelting Co Apparatus for grinding electrolysis matrixplate
US4109337A (en) * 1977-12-08 1978-08-29 Machine Technology, Inc. Automated two-sided cleaning apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5184371U (ja) * 1974-12-26 1976-07-06
JPS5371565A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Reticule washing equipment

Also Published As

Publication number Publication date
DE3067323D1 (en) 1984-05-10
EP0020088B1 (en) 1984-04-04
EP0020088A1 (en) 1980-12-10
US4570279A (en) 1986-02-18
JPS598352Y2 (ja) 1984-03-15

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