JPS5632728A - Mask washing apparatus - Google Patents

Mask washing apparatus

Info

Publication number
JPS5632728A
JPS5632728A JP10894479A JP10894479A JPS5632728A JP S5632728 A JPS5632728 A JP S5632728A JP 10894479 A JP10894479 A JP 10894479A JP 10894479 A JP10894479 A JP 10894479A JP S5632728 A JPS5632728 A JP S5632728A
Authority
JP
Japan
Prior art keywords
mask
washing
clampers
cassette
vertically positioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10894479A
Other languages
Japanese (ja)
Other versions
JPS6313336B2 (en
Inventor
Takeshi Yoshizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10894479A priority Critical patent/JPS5632728A/en
Publication of JPS5632728A publication Critical patent/JPS5632728A/en
Publication of JPS6313336B2 publication Critical patent/JPS6313336B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE:To prevent the injury of the fingers by carrying a photo-mask; washing both surfaces of the mask with the mask being vertically positioned; and automatically performing the uniform washing. CONSTITUTION:A cassette 6 enclosing a mask 7 is placed on a slider 3, and washing drums 20 and 20' are rotated. When clampers 9 and 9' are diven to hold the mask 7 in the cassette 6, the upper and lower ends of the mask 7 move the tapered channels of the clampers and the mask 7 is vertically positioned. At this time, an air cylinder 12 is driven to draw holders 17 and 17' nearer and to compress and hold the right and left edges 7b and 7b' of the mask. Then, the clampers are brought back, and an air cylinder 11 is driven to send te mask 7 to rotary drums 20 and 20' on a rail 19. Pure water is supplied from holes 20b and 20b', and washing is performed by sponges 20a and 20a'. Since the mask 7 is vertically positioned by the drums 20 and 20', both surfaces are washed completely independently, and one surface is not contaminated by the other surface. After the washing, the mask and the holders are brought back and enclosed in the grooves of the cassette, thereby, the holding is released, and the mask washing is finished.
JP10894479A 1979-08-27 1979-08-27 Mask washing apparatus Granted JPS5632728A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10894479A JPS5632728A (en) 1979-08-27 1979-08-27 Mask washing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10894479A JPS5632728A (en) 1979-08-27 1979-08-27 Mask washing apparatus

Publications (2)

Publication Number Publication Date
JPS5632728A true JPS5632728A (en) 1981-04-02
JPS6313336B2 JPS6313336B2 (en) 1988-03-25

Family

ID=14497598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10894479A Granted JPS5632728A (en) 1979-08-27 1979-08-27 Mask washing apparatus

Country Status (1)

Country Link
JP (1) JPS5632728A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207254A (en) * 1981-06-15 1982-12-18 Toshiba Corp Mask storage system
JPS59195653A (en) * 1983-04-21 1984-11-06 Nec Corp Method and device for washing photomask
JPS63137429A (en) * 1986-11-28 1988-06-09 Dainippon Screen Mfg Co Ltd Apparatus for washing both surface of substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5371565A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Reticule washing equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5371565A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Reticule washing equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207254A (en) * 1981-06-15 1982-12-18 Toshiba Corp Mask storage system
JPS59195653A (en) * 1983-04-21 1984-11-06 Nec Corp Method and device for washing photomask
JPS63137429A (en) * 1986-11-28 1988-06-09 Dainippon Screen Mfg Co Ltd Apparatus for washing both surface of substrate

Also Published As

Publication number Publication date
JPS6313336B2 (en) 1988-03-25

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