JPS5366377A - Method of etching silicon wafer - Google Patents

Method of etching silicon wafer

Info

Publication number
JPS5366377A
JPS5366377A JP14267476A JP14267476A JPS5366377A JP S5366377 A JPS5366377 A JP S5366377A JP 14267476 A JP14267476 A JP 14267476A JP 14267476 A JP14267476 A JP 14267476A JP S5366377 A JPS5366377 A JP S5366377A
Authority
JP
Japan
Prior art keywords
silicon wafer
etching silicon
etching
wafer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14267476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5532218B2 (da
Inventor
Eikou Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akai Electric Co Ltd
Original Assignee
Akai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akai Electric Co Ltd filed Critical Akai Electric Co Ltd
Priority to JP14267476A priority Critical patent/JPS5366377A/ja
Publication of JPS5366377A publication Critical patent/JPS5366377A/ja
Publication of JPS5532218B2 publication Critical patent/JPS5532218B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP14267476A 1976-11-26 1976-11-26 Method of etching silicon wafer Granted JPS5366377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14267476A JPS5366377A (en) 1976-11-26 1976-11-26 Method of etching silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14267476A JPS5366377A (en) 1976-11-26 1976-11-26 Method of etching silicon wafer

Publications (2)

Publication Number Publication Date
JPS5366377A true JPS5366377A (en) 1978-06-13
JPS5532218B2 JPS5532218B2 (da) 1980-08-23

Family

ID=15320858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14267476A Granted JPS5366377A (en) 1976-11-26 1976-11-26 Method of etching silicon wafer

Country Status (1)

Country Link
JP (1) JPS5366377A (da)

Also Published As

Publication number Publication date
JPS5532218B2 (da) 1980-08-23

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