JPS5532218B2 - - Google Patents
Info
- Publication number
- JPS5532218B2 JPS5532218B2 JP14267476A JP14267476A JPS5532218B2 JP S5532218 B2 JPS5532218 B2 JP S5532218B2 JP 14267476 A JP14267476 A JP 14267476A JP 14267476 A JP14267476 A JP 14267476A JP S5532218 B2 JPS5532218 B2 JP S5532218B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14267476A JPS5366377A (en) | 1976-11-26 | 1976-11-26 | Method of etching silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14267476A JPS5366377A (en) | 1976-11-26 | 1976-11-26 | Method of etching silicon wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5366377A JPS5366377A (en) | 1978-06-13 |
| JPS5532218B2 true JPS5532218B2 (da) | 1980-08-23 |
Family
ID=15320858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14267476A Granted JPS5366377A (en) | 1976-11-26 | 1976-11-26 | Method of etching silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5366377A (da) |
-
1976
- 1976-11-26 JP JP14267476A patent/JPS5366377A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5366377A (en) | 1978-06-13 |