JPS5364636A - Dry etching device - Google Patents

Dry etching device

Info

Publication number
JPS5364636A
JPS5364636A JP13955476A JP13955476A JPS5364636A JP S5364636 A JPS5364636 A JP S5364636A JP 13955476 A JP13955476 A JP 13955476A JP 13955476 A JP13955476 A JP 13955476A JP S5364636 A JPS5364636 A JP S5364636A
Authority
JP
Japan
Prior art keywords
dry etching
etching device
dry
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13955476A
Other languages
Japanese (ja)
Other versions
JPS5428381B2 (en
Inventor
Masaharu Ojima
Kazumasa Kizawa
Shizuka Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13955476A priority Critical patent/JPS5364636A/en
Publication of JPS5364636A publication Critical patent/JPS5364636A/en
Publication of JPS5428381B2 publication Critical patent/JPS5428381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP13955476A 1976-11-22 1976-11-22 Dry etching device Granted JPS5364636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13955476A JPS5364636A (en) 1976-11-22 1976-11-22 Dry etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13955476A JPS5364636A (en) 1976-11-22 1976-11-22 Dry etching device

Publications (2)

Publication Number Publication Date
JPS5364636A true JPS5364636A (en) 1978-06-09
JPS5428381B2 JPS5428381B2 (en) 1979-09-17

Family

ID=15247959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13955476A Granted JPS5364636A (en) 1976-11-22 1976-11-22 Dry etching device

Country Status (1)

Country Link
JP (1) JPS5364636A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5625972A (en) * 1979-08-09 1981-03-12 Fujitsu Ltd Etching treatment by plasma
JPS57154147U (en) * 1981-03-20 1982-09-28
JPS57169241A (en) * 1981-04-13 1982-10-18 Oki Electric Ind Co Ltd Dry etching method
JPS58225638A (en) * 1982-06-24 1983-12-27 Toshiba Corp Detection of etching end

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032245C2 (en) * 1980-08-27 1986-01-23 VEGLA Vereinigte Glaswerke GmbH, 5100 Aachen Rear window for automobiles

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104268A (en) * 1975-03-12 1976-09-14 Fujitsu Ltd ETSUCHINGUSOCHINOSEIGYOHOHO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104268A (en) * 1975-03-12 1976-09-14 Fujitsu Ltd ETSUCHINGUSOCHINOSEIGYOHOHO

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5625972A (en) * 1979-08-09 1981-03-12 Fujitsu Ltd Etching treatment by plasma
JPS5730907B2 (en) * 1979-08-09 1982-07-01
JPS57154147U (en) * 1981-03-20 1982-09-28
JPS57169241A (en) * 1981-04-13 1982-10-18 Oki Electric Ind Co Ltd Dry etching method
JPS58225638A (en) * 1982-06-24 1983-12-27 Toshiba Corp Detection of etching end
JPH0454968B2 (en) * 1982-06-24 1992-09-01 Tokyo Shibaura Electric Co

Also Published As

Publication number Publication date
JPS5428381B2 (en) 1979-09-17

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