JPS51104268A - ETSUCHINGUSOCHINOSEIGYOHOHO - Google Patents
ETSUCHINGUSOCHINOSEIGYOHOHOInfo
- Publication number
- JPS51104268A JPS51104268A JP2976975A JP2976975A JPS51104268A JP S51104268 A JPS51104268 A JP S51104268A JP 2976975 A JP2976975 A JP 2976975A JP 2976975 A JP2976975 A JP 2976975A JP S51104268 A JPS51104268 A JP S51104268A
- Authority
- JP
- Japan
- Prior art keywords
- etsuchingusochinoseigyohoho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2976975A JPS51104268A (en) | 1975-03-12 | 1975-03-12 | ETSUCHINGUSOCHINOSEIGYOHOHO |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2976975A JPS51104268A (en) | 1975-03-12 | 1975-03-12 | ETSUCHINGUSOCHINOSEIGYOHOHO |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51104268A true JPS51104268A (en) | 1976-09-14 |
Family
ID=12285237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2976975A Pending JPS51104268A (en) | 1975-03-12 | 1975-03-12 | ETSUCHINGUSOCHINOSEIGYOHOHO |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51104268A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5364636A (en) * | 1976-11-22 | 1978-06-09 | Nippon Telegraph & Telephone | Dry etching device |
JPS60251626A (en) * | 1984-05-28 | 1985-12-12 | Mitsubishi Electric Corp | Detecting method for terminal point of etching |
-
1975
- 1975-03-12 JP JP2976975A patent/JPS51104268A/en active Pending
Non-Patent Citations (1)
Title |
---|
J.VAC.SCI.TECHNOL=1973 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5364636A (en) * | 1976-11-22 | 1978-06-09 | Nippon Telegraph & Telephone | Dry etching device |
JPS5428381B2 (en) * | 1976-11-22 | 1979-09-17 | ||
JPS60251626A (en) * | 1984-05-28 | 1985-12-12 | Mitsubishi Electric Corp | Detecting method for terminal point of etching |
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