JPS57154147U - - Google Patents
Info
- Publication number
- JPS57154147U JPS57154147U JP4003381U JP4003381U JPS57154147U JP S57154147 U JPS57154147 U JP S57154147U JP 4003381 U JP4003381 U JP 4003381U JP 4003381 U JP4003381 U JP 4003381U JP S57154147 U JPS57154147 U JP S57154147U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4003381U JPS57154147U (en) | 1981-03-20 | 1981-03-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4003381U JPS57154147U (en) | 1981-03-20 | 1981-03-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57154147U true JPS57154147U (en) | 1982-09-28 |
Family
ID=29837145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4003381U Pending JPS57154147U (en) | 1981-03-20 | 1981-03-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57154147U (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS517767A (en) * | 1974-07-09 | 1976-01-22 | Matsushita Electric Works Ltd | |
JPS5364636A (en) * | 1976-11-22 | 1978-06-09 | Nippon Telegraph & Telephone | Dry etching device |
JPS53108286A (en) * | 1977-03-03 | 1978-09-20 | Nichiden Varian Kk | Etching control device |
JPS56115536A (en) * | 1980-02-15 | 1981-09-10 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Detecting method for finish time of dry etching reaction |
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1981
- 1981-03-20 JP JP4003381U patent/JPS57154147U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS517767A (en) * | 1974-07-09 | 1976-01-22 | Matsushita Electric Works Ltd | |
JPS5364636A (en) * | 1976-11-22 | 1978-06-09 | Nippon Telegraph & Telephone | Dry etching device |
JPS53108286A (en) * | 1977-03-03 | 1978-09-20 | Nichiden Varian Kk | Etching control device |
JPS56115536A (en) * | 1980-02-15 | 1981-09-10 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Detecting method for finish time of dry etching reaction |