JPS57154147U - - Google Patents

Info

Publication number
JPS57154147U
JPS57154147U JP4003381U JP4003381U JPS57154147U JP S57154147 U JPS57154147 U JP S57154147U JP 4003381 U JP4003381 U JP 4003381U JP 4003381 U JP4003381 U JP 4003381U JP S57154147 U JPS57154147 U JP S57154147U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4003381U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4003381U priority Critical patent/JPS57154147U/ja
Publication of JPS57154147U publication Critical patent/JPS57154147U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP4003381U 1981-03-20 1981-03-20 Pending JPS57154147U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4003381U JPS57154147U (en) 1981-03-20 1981-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4003381U JPS57154147U (en) 1981-03-20 1981-03-20

Publications (1)

Publication Number Publication Date
JPS57154147U true JPS57154147U (en) 1982-09-28

Family

ID=29837145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4003381U Pending JPS57154147U (en) 1981-03-20 1981-03-20

Country Status (1)

Country Link
JP (1) JPS57154147U (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517767A (en) * 1974-07-09 1976-01-22 Matsushita Electric Works Ltd
JPS5364636A (en) * 1976-11-22 1978-06-09 Nippon Telegraph & Telephone Dry etching device
JPS53108286A (en) * 1977-03-03 1978-09-20 Nichiden Varian Kk Etching control device
JPS56115536A (en) * 1980-02-15 1981-09-10 Chiyou Lsi Gijutsu Kenkyu Kumiai Detecting method for finish time of dry etching reaction

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517767A (en) * 1974-07-09 1976-01-22 Matsushita Electric Works Ltd
JPS5364636A (en) * 1976-11-22 1978-06-09 Nippon Telegraph & Telephone Dry etching device
JPS53108286A (en) * 1977-03-03 1978-09-20 Nichiden Varian Kk Etching control device
JPS56115536A (en) * 1980-02-15 1981-09-10 Chiyou Lsi Gijutsu Kenkyu Kumiai Detecting method for finish time of dry etching reaction

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