JPS5357752A - Impurity deposaition method to semiconductor - Google Patents

Impurity deposaition method to semiconductor

Info

Publication number
JPS5357752A
JPS5357752A JP13175376A JP13175376A JPS5357752A JP S5357752 A JPS5357752 A JP S5357752A JP 13175376 A JP13175376 A JP 13175376A JP 13175376 A JP13175376 A JP 13175376A JP S5357752 A JPS5357752 A JP S5357752A
Authority
JP
Japan
Prior art keywords
impurity
deposaition
semiconductor
gases
semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13175376A
Other languages
English (en)
Other versions
JPS5442581B2 (ja
Inventor
Keizo Inaba
Toshio Tanabe
Noboru Tatefuru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13175376A priority Critical patent/JPS5357752A/ja
Publication of JPS5357752A publication Critical patent/JPS5357752A/ja
Publication of JPS5442581B2 publication Critical patent/JPS5442581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP13175376A 1976-11-04 1976-11-04 Impurity deposaition method to semiconductor Granted JPS5357752A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13175376A JPS5357752A (en) 1976-11-04 1976-11-04 Impurity deposaition method to semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13175376A JPS5357752A (en) 1976-11-04 1976-11-04 Impurity deposaition method to semiconductor

Publications (2)

Publication Number Publication Date
JPS5357752A true JPS5357752A (en) 1978-05-25
JPS5442581B2 JPS5442581B2 (ja) 1979-12-14

Family

ID=15065375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13175376A Granted JPS5357752A (en) 1976-11-04 1976-11-04 Impurity deposaition method to semiconductor

Country Status (1)

Country Link
JP (1) JPS5357752A (ja)

Also Published As

Publication number Publication date
JPS5442581B2 (ja) 1979-12-14

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