JPS53145565A - Production appararus of semiconductor crystals - Google Patents

Production appararus of semiconductor crystals

Info

Publication number
JPS53145565A
JPS53145565A JP6153577A JP6153577A JPS53145565A JP S53145565 A JPS53145565 A JP S53145565A JP 6153577 A JP6153577 A JP 6153577A JP 6153577 A JP6153577 A JP 6153577A JP S53145565 A JPS53145565 A JP S53145565A
Authority
JP
Japan
Prior art keywords
appararus
production
semiconductor crystals
crystals
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6153577A
Other languages
Japanese (ja)
Inventor
Michihiro Ito
Takeshi Suzuki
Mikio Nishihata
Hironobu Hatakeyama
Hidejiro Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6153577A priority Critical patent/JPS53145565A/en
Publication of JPS53145565A publication Critical patent/JPS53145565A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To control carrier concentrations accurately by controlling the contact area of growing melts and reaction gases.
COPYRIGHT: (C)1978,JPO&Japio
JP6153577A 1977-05-25 1977-05-25 Production appararus of semiconductor crystals Pending JPS53145565A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6153577A JPS53145565A (en) 1977-05-25 1977-05-25 Production appararus of semiconductor crystals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6153577A JPS53145565A (en) 1977-05-25 1977-05-25 Production appararus of semiconductor crystals

Publications (1)

Publication Number Publication Date
JPS53145565A true JPS53145565A (en) 1978-12-18

Family

ID=13173888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6153577A Pending JPS53145565A (en) 1977-05-25 1977-05-25 Production appararus of semiconductor crystals

Country Status (1)

Country Link
JP (1) JPS53145565A (en)

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