JPS5356977A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5356977A
JPS5356977A JP13216476A JP13216476A JPS5356977A JP S5356977 A JPS5356977 A JP S5356977A JP 13216476 A JP13216476 A JP 13216476A JP 13216476 A JP13216476 A JP 13216476A JP S5356977 A JPS5356977 A JP S5356977A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
regions
wefer
enlarging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13216476A
Other languages
Japanese (ja)
Other versions
JPS5813032B2 (en
Inventor
Yasunari Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13216476A priority Critical patent/JPS5813032B2/en
Publication of JPS5356977A publication Critical patent/JPS5356977A/en
Publication of JPS5813032B2 publication Critical patent/JPS5813032B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To make stepping without enlarging the area of gate regions by making grooves in the specified regions of a wefer surface through the use of a two layered mask of an anti-oxidation film and a softened fluid resin film.
COPYRIGHT: (C)1978,JPO&Japio
JP13216476A 1976-11-01 1976-11-01 Manufacturing method of semiconductor device Expired JPS5813032B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13216476A JPS5813032B2 (en) 1976-11-01 1976-11-01 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13216476A JPS5813032B2 (en) 1976-11-01 1976-11-01 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5356977A true JPS5356977A (en) 1978-05-23
JPS5813032B2 JPS5813032B2 (en) 1983-03-11

Family

ID=15074853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13216476A Expired JPS5813032B2 (en) 1976-11-01 1976-11-01 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5813032B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6292480A (en) * 1985-10-18 1987-04-27 Sanyo Electric Co Ltd Manufacture of compound semiconductor device
JPH01120075A (en) * 1987-11-02 1989-05-12 Agency Of Ind Science & Technol Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6292480A (en) * 1985-10-18 1987-04-27 Sanyo Electric Co Ltd Manufacture of compound semiconductor device
JPH01120075A (en) * 1987-11-02 1989-05-12 Agency Of Ind Science & Technol Semiconductor device

Also Published As

Publication number Publication date
JPS5813032B2 (en) 1983-03-11

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