JPS5356977A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5356977A JPS5356977A JP13216476A JP13216476A JPS5356977A JP S5356977 A JPS5356977 A JP S5356977A JP 13216476 A JP13216476 A JP 13216476A JP 13216476 A JP13216476 A JP 13216476A JP S5356977 A JPS5356977 A JP S5356977A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- regions
- wefer
- enlarging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To make stepping without enlarging the area of gate regions by making grooves in the specified regions of a wefer surface through the use of a two layered mask of an anti-oxidation film and a softened fluid resin film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13216476A JPS5813032B2 (en) | 1976-11-01 | 1976-11-01 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13216476A JPS5813032B2 (en) | 1976-11-01 | 1976-11-01 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5356977A true JPS5356977A (en) | 1978-05-23 |
JPS5813032B2 JPS5813032B2 (en) | 1983-03-11 |
Family
ID=15074853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13216476A Expired JPS5813032B2 (en) | 1976-11-01 | 1976-11-01 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5813032B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6292480A (en) * | 1985-10-18 | 1987-04-27 | Sanyo Electric Co Ltd | Manufacture of compound semiconductor device |
JPH01120075A (en) * | 1987-11-02 | 1989-05-12 | Agency Of Ind Science & Technol | Semiconductor device |
-
1976
- 1976-11-01 JP JP13216476A patent/JPS5813032B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6292480A (en) * | 1985-10-18 | 1987-04-27 | Sanyo Electric Co Ltd | Manufacture of compound semiconductor device |
JPH01120075A (en) * | 1987-11-02 | 1989-05-12 | Agency Of Ind Science & Technol | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5813032B2 (en) | 1983-03-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5223263A (en) | Method of manufacturing semiconductor device | |
JPS5356977A (en) | Production of semiconductor device | |
JPS5253673A (en) | Device and production for semiconductor | |
JPS5292486A (en) | Manufacture of mis-type semiconductor device | |
JPS5363877A (en) | Production of semiconductor device | |
JPS5357773A (en) | Semiconductor device | |
JPS5365079A (en) | Semiconductor device | |
JPS5348458A (en) | Production of semiconductor device | |
JPS5368172A (en) | Production of semiconductor device | |
JPS52153669A (en) | Photo mask of semiconductor integrated circuit | |
JPS52123879A (en) | Mos type semiconductor device and its production | |
JPS5321569A (en) | Production of semiconductor device | |
JPS5317286A (en) | Production of semiconductor device | |
JPS5251872A (en) | Production of semiconductor device | |
JPS5335386A (en) | Production of semiconductor device | |
JPS5321568A (en) | Production of semiconductor device | |
JPS5361968A (en) | Production of semiconductor device | |
JPS5363595A (en) | Magnetic bubble device | |
JPS5345174A (en) | Moisture resistant semiconductor device | |
JPS5354489A (en) | Production of semiconductor device | |
JPS52179A (en) | Method of fabricating semiconductor | |
JPS5287359A (en) | Production of semiconductor device | |
JPS533169A (en) | Production of semiconductor device | |
JPS5376745A (en) | Production of semiconductor device | |
JPS5358783A (en) | Semiconductor device and its production |