JPS5354992A - Semiconductor strain detector - Google Patents
Semiconductor strain detectorInfo
- Publication number
- JPS5354992A JPS5354992A JP13032776A JP13032776A JPS5354992A JP S5354992 A JPS5354992 A JP S5354992A JP 13032776 A JP13032776 A JP 13032776A JP 13032776 A JP13032776 A JP 13032776A JP S5354992 A JPS5354992 A JP S5354992A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor strain
- strain detector
- piezoelectric elements
- detector
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
PURPOSE: To reduce the effect of external induction noises ofr detection signls by providing a conductor layer between fixing members which fix piezoelectric elements and the piezoelectric elements in astrain detector which amplifies the signals produced owing to the changes in the resistance of the piezo resistance elements diffusion-Fformed in a semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13032776A JPS5354992A (en) | 1976-10-28 | 1976-10-28 | Semiconductor strain detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13032776A JPS5354992A (en) | 1976-10-28 | 1976-10-28 | Semiconductor strain detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5354992A true JPS5354992A (en) | 1978-05-18 |
Family
ID=15031690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13032776A Pending JPS5354992A (en) | 1976-10-28 | 1976-10-28 | Semiconductor strain detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5354992A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55137565U (en) * | 1979-03-20 | 1980-09-30 | ||
US6578426B2 (en) | 2000-12-25 | 2003-06-17 | Denso Corporation | Pressure sensor having semiconductor sensor chip |
-
1976
- 1976-10-28 JP JP13032776A patent/JPS5354992A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55137565U (en) * | 1979-03-20 | 1980-09-30 | ||
US6578426B2 (en) | 2000-12-25 | 2003-06-17 | Denso Corporation | Pressure sensor having semiconductor sensor chip |
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