JPS5354992A - Semiconductor strain detector - Google Patents

Semiconductor strain detector

Info

Publication number
JPS5354992A
JPS5354992A JP13032776A JP13032776A JPS5354992A JP S5354992 A JPS5354992 A JP S5354992A JP 13032776 A JP13032776 A JP 13032776A JP 13032776 A JP13032776 A JP 13032776A JP S5354992 A JPS5354992 A JP S5354992A
Authority
JP
Japan
Prior art keywords
semiconductor strain
strain detector
piezoelectric elements
detector
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13032776A
Other languages
Japanese (ja)
Inventor
Kazuji Yamada
Yoshitaka Matsuoka
Motohisa Nishihara
Tetsuo Kosugi
Michitaka Shimazoe
Yukio Takahashi
Tsutomu Okayama
Satoshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13032776A priority Critical patent/JPS5354992A/en
Publication of JPS5354992A publication Critical patent/JPS5354992A/en
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE: To reduce the effect of external induction noises ofr detection signls by providing a conductor layer between fixing members which fix piezoelectric elements and the piezoelectric elements in astrain detector which amplifies the signals produced owing to the changes in the resistance of the piezo resistance elements diffusion-Fformed in a semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP13032776A 1976-10-28 1976-10-28 Semiconductor strain detector Pending JPS5354992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13032776A JPS5354992A (en) 1976-10-28 1976-10-28 Semiconductor strain detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13032776A JPS5354992A (en) 1976-10-28 1976-10-28 Semiconductor strain detector

Publications (1)

Publication Number Publication Date
JPS5354992A true JPS5354992A (en) 1978-05-18

Family

ID=15031690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13032776A Pending JPS5354992A (en) 1976-10-28 1976-10-28 Semiconductor strain detector

Country Status (1)

Country Link
JP (1) JPS5354992A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137565U (en) * 1979-03-20 1980-09-30
US6578426B2 (en) 2000-12-25 2003-06-17 Denso Corporation Pressure sensor having semiconductor sensor chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137565U (en) * 1979-03-20 1980-09-30
US6578426B2 (en) 2000-12-25 2003-06-17 Denso Corporation Pressure sensor having semiconductor sensor chip

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