JPS5349957A - Focusing method for electronic beam exposure device - Google Patents

Focusing method for electronic beam exposure device

Info

Publication number
JPS5349957A
JPS5349957A JP12471876A JP12471876A JPS5349957A JP S5349957 A JPS5349957 A JP S5349957A JP 12471876 A JP12471876 A JP 12471876A JP 12471876 A JP12471876 A JP 12471876A JP S5349957 A JPS5349957 A JP S5349957A
Authority
JP
Japan
Prior art keywords
electronic beam
exposure device
beam exposure
focusing method
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12471876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5339749B2 (enExample
Inventor
Moritaka Nakamura
Yasutaka Ban
Haruo Tsuchikawa
Hiroshi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12471876A priority Critical patent/JPS5349957A/ja
Publication of JPS5349957A publication Critical patent/JPS5349957A/ja
Publication of JPS5339749B2 publication Critical patent/JPS5339749B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP12471876A 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device Granted JPS5349957A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12471876A JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12471876A JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Publications (2)

Publication Number Publication Date
JPS5349957A true JPS5349957A (en) 1978-05-06
JPS5339749B2 JPS5339749B2 (enExample) 1978-10-23

Family

ID=14892375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12471876A Granted JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Country Status (1)

Country Link
JP (1) JPS5349957A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4684809A (en) * 1984-09-29 1987-08-04 Kabushiki Kaisha Toshiba Method of adjusting optical column in energy beam exposure system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4684809A (en) * 1984-09-29 1987-08-04 Kabushiki Kaisha Toshiba Method of adjusting optical column in energy beam exposure system

Also Published As

Publication number Publication date
JPS5339749B2 (enExample) 1978-10-23

Similar Documents

Publication Publication Date Title
JPS5390872A (en) Optical device
JPS53131826A (en) Photographing system for photograph data of camera
JPS52147430A (en) Focus detection device
JPS5387217A (en) Focusing device
JPS52138924A (en) Focal detector
JPS524178A (en) Small object automatic positioning apparatus
JPS5349957A (en) Focusing method for electronic beam exposure device
JPS5330397A (en) Ticket inspecting system
JPS5417620A (en) Solid pickup element
JPS5327439A (en) Focus measuring device
JPS53125044A (en) Semiconductor laser scanner
JPS5346266A (en) Electronic microscope
JPS5240327A (en) Method of photographing models by scanning
JPS52130338A (en) Focusing point detectig means
JPS53120277A (en) Electron beam exposure device
JPS53128975A (en) Automatic focus control device for scanning type electron beam device and others
JPS52140351A (en) Time series hologram photographing device
JPS52117578A (en) Electron beam exposing method
JPS5360162A (en) Electron beam irradiation device
JPS542630A (en) Character read system
JPS5230321A (en) Television camera device
JPS5397826A (en) Focal point detecting system
JPS5235630A (en) Enlarging optical system for finder
JPS5437474A (en) Electron beam exposure device
JPS53101279A (en) Electron beam exposure device