JPS5347782A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5347782A JPS5347782A JP12192376A JP12192376A JPS5347782A JP S5347782 A JPS5347782 A JP S5347782A JP 12192376 A JP12192376 A JP 12192376A JP 12192376 A JP12192376 A JP 12192376A JP S5347782 A JPS5347782 A JP S5347782A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- superposed
- constructing
- spaced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To drastically reduce junction capacity and improve breakdown strength of element by so constructing the device that channel stoppers are spaced from and not superposed with source, drain regions.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12192376A JPS5347782A (en) | 1976-10-13 | 1976-10-13 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12192376A JPS5347782A (en) | 1976-10-13 | 1976-10-13 | Production of semiconductor device |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16815983A Division JPS59103353A (en) | 1983-09-14 | 1983-09-14 | Manufacture of semiconductor device |
JP20400684A Division JPS60105250A (en) | 1984-10-01 | 1984-10-01 | Method for introducing impurity |
JP20400584A Division JPS60105249A (en) | 1984-10-01 | 1984-10-01 | Method for introducing impurity |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5347782A true JPS5347782A (en) | 1978-04-28 |
Family
ID=14823250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12192376A Pending JPS5347782A (en) | 1976-10-13 | 1976-10-13 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5347782A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5735341A (en) * | 1980-08-12 | 1982-02-25 | Toshiba Corp | Method of seperating elements of semiconductor device |
JPS57155747A (en) * | 1981-03-20 | 1982-09-25 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59103353A (en) * | 1983-09-14 | 1984-06-14 | Hitachi Ltd | Manufacture of semiconductor device |
-
1976
- 1976-10-13 JP JP12192376A patent/JPS5347782A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5735341A (en) * | 1980-08-12 | 1982-02-25 | Toshiba Corp | Method of seperating elements of semiconductor device |
JPH0214782B2 (en) * | 1980-08-12 | 1990-04-10 | Tokyo Shibaura Electric Co | |
JPS57155747A (en) * | 1981-03-20 | 1982-09-25 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH0350418B2 (en) * | 1981-03-20 | 1991-08-01 | Fujitsu Ltd | |
JPS59103353A (en) * | 1983-09-14 | 1984-06-14 | Hitachi Ltd | Manufacture of semiconductor device |
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