JPS5347782A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5347782A
JPS5347782A JP12192376A JP12192376A JPS5347782A JP S5347782 A JPS5347782 A JP S5347782A JP 12192376 A JP12192376 A JP 12192376A JP 12192376 A JP12192376 A JP 12192376A JP S5347782 A JPS5347782 A JP S5347782A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
superposed
constructing
spaced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12192376A
Other languages
Japanese (ja)
Inventor
Nozomi Horino
Yasuo Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12192376A priority Critical patent/JPS5347782A/en
Publication of JPS5347782A publication Critical patent/JPS5347782A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To drastically reduce junction capacity and improve breakdown strength of element by so constructing the device that channel stoppers are spaced from and not superposed with source, drain regions.
COPYRIGHT: (C)1978,JPO&Japio
JP12192376A 1976-10-13 1976-10-13 Production of semiconductor device Pending JPS5347782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12192376A JPS5347782A (en) 1976-10-13 1976-10-13 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12192376A JPS5347782A (en) 1976-10-13 1976-10-13 Production of semiconductor device

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP16815983A Division JPS59103353A (en) 1983-09-14 1983-09-14 Manufacture of semiconductor device
JP20400684A Division JPS60105250A (en) 1984-10-01 1984-10-01 Method for introducing impurity
JP20400584A Division JPS60105249A (en) 1984-10-01 1984-10-01 Method for introducing impurity

Publications (1)

Publication Number Publication Date
JPS5347782A true JPS5347782A (en) 1978-04-28

Family

ID=14823250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12192376A Pending JPS5347782A (en) 1976-10-13 1976-10-13 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5347782A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735341A (en) * 1980-08-12 1982-02-25 Toshiba Corp Method of seperating elements of semiconductor device
JPS57155747A (en) * 1981-03-20 1982-09-25 Fujitsu Ltd Manufacture of semiconductor device
JPS59103353A (en) * 1983-09-14 1984-06-14 Hitachi Ltd Manufacture of semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735341A (en) * 1980-08-12 1982-02-25 Toshiba Corp Method of seperating elements of semiconductor device
JPH0214782B2 (en) * 1980-08-12 1990-04-10 Tokyo Shibaura Electric Co
JPS57155747A (en) * 1981-03-20 1982-09-25 Fujitsu Ltd Manufacture of semiconductor device
JPH0350418B2 (en) * 1981-03-20 1991-08-01 Fujitsu Ltd
JPS59103353A (en) * 1983-09-14 1984-06-14 Hitachi Ltd Manufacture of semiconductor device

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