JPS5347263A - Scan-type electronic microscope and its similar device - Google Patents
Scan-type electronic microscope and its similar deviceInfo
- Publication number
- JPS5347263A JPS5347263A JP12205376A JP12205376A JPS5347263A JP S5347263 A JPS5347263 A JP S5347263A JP 12205376 A JP12205376 A JP 12205376A JP 12205376 A JP12205376 A JP 12205376A JP S5347263 A JPS5347263 A JP S5347263A
- Authority
- JP
- Japan
- Prior art keywords
- scan
- similar device
- type electronic
- electronic microscope
- analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12205376A JPS5347263A (en) | 1976-10-12 | 1976-10-12 | Scan-type electronic microscope and its similar device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12205376A JPS5347263A (en) | 1976-10-12 | 1976-10-12 | Scan-type electronic microscope and its similar device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5347263A true JPS5347263A (en) | 1978-04-27 |
Family
ID=14826438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12205376A Pending JPS5347263A (en) | 1976-10-12 | 1976-10-12 | Scan-type electronic microscope and its similar device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5347263A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58150256A (ja) * | 1982-03-01 | 1983-09-06 | Toshiba Corp | ストロボ走査型電子顕微鏡装置 |
JPS60189148A (ja) * | 1984-03-08 | 1985-09-26 | Akashi Seisakusho Co Ltd | 走査型電子線装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5181694A (ja) * | 1975-01-16 | 1976-07-17 | Hitachi Ltd |
-
1976
- 1976-10-12 JP JP12205376A patent/JPS5347263A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5181694A (ja) * | 1975-01-16 | 1976-07-17 | Hitachi Ltd |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58150256A (ja) * | 1982-03-01 | 1983-09-06 | Toshiba Corp | ストロボ走査型電子顕微鏡装置 |
JPH041458B2 (ja) * | 1982-03-01 | 1992-01-13 | Tokyo Shibaura Electric Co | |
JPS60189148A (ja) * | 1984-03-08 | 1985-09-26 | Akashi Seisakusho Co Ltd | 走査型電子線装置 |
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