JPS5315738A - Focal point matching device for electroinc line unit - Google Patents

Focal point matching device for electroinc line unit

Info

Publication number
JPS5315738A
JPS5315738A JP8917476A JP8917476A JPS5315738A JP S5315738 A JPS5315738 A JP S5315738A JP 8917476 A JP8917476 A JP 8917476A JP 8917476 A JP8917476 A JP 8917476A JP S5315738 A JPS5315738 A JP S5315738A
Authority
JP
Japan
Prior art keywords
focal point
point matching
electroinc
matching device
line unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8917476A
Other languages
Japanese (ja)
Other versions
JPS5824899B2 (en
Inventor
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51089174A priority Critical patent/JPS5824899B2/en
Publication of JPS5315738A publication Critical patent/JPS5315738A/en
Publication of JPS5824899B2 publication Critical patent/JPS5824899B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To provide a slit and a detector positioned close to each other are provided at the area where a image of the moving test sample is to be produced by the conventional coupler, and thus to obtain a device which can have an easy and accurate focal point matching even in the darkness through which an observation has been hitherto impossible with the maked eye.
COPYRIGHT: (C)1978,JPO&Japio
JP51089174A 1976-07-28 1976-07-28 Focusing device for electron beam equipment Expired JPS5824899B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51089174A JPS5824899B2 (en) 1976-07-28 1976-07-28 Focusing device for electron beam equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51089174A JPS5824899B2 (en) 1976-07-28 1976-07-28 Focusing device for electron beam equipment

Publications (2)

Publication Number Publication Date
JPS5315738A true JPS5315738A (en) 1978-02-14
JPS5824899B2 JPS5824899B2 (en) 1983-05-24

Family

ID=13963408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51089174A Expired JPS5824899B2 (en) 1976-07-28 1976-07-28 Focusing device for electron beam equipment

Country Status (1)

Country Link
JP (1) JPS5824899B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4680469A (en) * 1984-08-17 1987-07-14 Hitachi, Ltd. Focusing device for a television electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912763A (en) * 1972-05-10 1974-02-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912763A (en) * 1972-05-10 1974-02-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4680469A (en) * 1984-08-17 1987-07-14 Hitachi, Ltd. Focusing device for a television electron microscope

Also Published As

Publication number Publication date
JPS5824899B2 (en) 1983-05-24

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